Ion source assembly with multiple elliptical filaments
AssigneeInficon GmbH
InventorsMichael Vollero, Mario Weder, Jochen Wagner
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AssigneeInficon GmbH
InventorsMichael Vollero, Mario Weder, Jochen Wagner
Estimating the term…
An electron bombardment ion source assembly for use in a mass spectrometer and including an anode extending along an axis and surrounding an ionization volume. At least two filaments are each configured to thermionically emit electrons and are positioned outside the ionization volume and proximate to the anode. The at least two filaments each comprise an elliptically-shaped portion and non-elliptical portions on either end of the elliptically-shaped portion. The non-elliptically-shaped portions are configured to be mounted in a fixed position relative to the anode to maintain a constant distance between the elliptically-shaped portion and the anode. The elliptically-shaped portion extends along a plane that intersects a plane perpendicular to the axis of the anode at a non-zero angle.
An electron bombardment ion source assembly for use in a mass spectrometer, comprising:
An electron bombardment ion source assembly for use in a mass spectrometer, comprising:
Dependencies are inferred from the claim text.