H01J 27/22
Metal ion sources
H01J27/22 (Metal ion sources) appears on 62 US grants and 33 published applications in this corpus.
Search patents in H01J- Granted patents
- 62
- Published applications
- 33
- Assignees
- 41
- Inventors
- 126
- Latest grant
- 4 Nov 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 1 | 0 |
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 1 | 0 |
| 1985 | 1 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 3 | 0 |
| 1992 | 5 | 0 |
| 1993 | 1 | 0 |
| 1994 | 3 | 0 |
| 1995 | 3 | 0 |
| 1996 | 2 | 0 |
| 1997 | 1 | 0 |
| 1998 | 1 | 0 |
| 1999 | 5 | 0 |
| 2000 | 1 | 0 |
| 2001 | 1 | 1 |
| 2002 | 1 | 1 |
| 2003 | 2 | 0 |
| 2004 | 0 | 1 |
| 2005 | 1 | 1 |
| 2006 | 1 | 1 |
| 2007 | 1 | 1 |
| 2008 | 1 | 2 |
| 2009 | 0 | 0 |
| 2010 | 1 | 0 |
| 2011 | 0 | 0 |
| 2012 | 0 | 0 |
| 2013 | 1 | 1 |
| 2014 | 0 | 4 |
| 2015 | 2 | 1 |
| 2016 | 0 | 2 |
| 2017 | 6 | 3 |
| 2018 | 2 | 3 |
| 2019 | 2 | 3 |
| 2020 | 4 | 0 |
| 2021 | 2 | 1 |
| 2022 | 0 | 2 |
| 2023 | 4 | 2 |
| 2024 | 0 | 1 |
| 2025 | 1 | 1 |
| 2026 | 0 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Isothermal ion source with auxiliary heaters4 Nov 2025US 12,463,001 B2SHINE Technologies, LLC
- Crucible design for liquid metal in an ion source26 Dec 2023US 11,854,760 B2APPLIED Materials.Inc.
- Discharge device with minimal noise generation26 Dec 2023US 11,855,418 B2Sharp Kabushiki Kaisha
- Method and device for operating a liquid metal-ion source or liquid metal electron source as well as a liquid metal-ion source or liquid metal electron source18 Jul 2023US 11,705,299 B2Technische UniversitäT Dresden
- Etching aluminum nitride or aluminum oxide to generate an aluminum ion beam11 Jul 2023US 11,699,563 B2Axcelis Technologies, Inc.
- Ion source28 May 2026US 2026/0150177 A1Nissin Ion Equipment Co., Ltd.
- A method and arrangement for negative ion production18 Dec 2025US 2025/0385063 A1JyväSkyläN Yliopisto
- Isothermal ion source with auxiliary heaters8 Feb 2024US 2024/0047165 A1SHINE Technologies, LLC
- Hybrid ion source for aluminum ion generation using a target holder and organoaluminium compounds16 Nov 2023US 2023/0369006 A1
- Discharge device22 Jun 2023US 2023/0198233 A1Sharp Kabushiki Kaisha
Most cited
By later US patents
- Magnetically-filtered cathodic arc plasma apparatus35US 5,317,235 AISM Technolog · 1994
- Apparatus for coating a surface with a metal utilizing a plasma source26US 5,013,578 AUniversity of California · 1991
- Thermal field emission cathode20US 5,449,968 ADenki Kagaku Kogyo Kabushiki Kaisha · 1995
- Arc chamber for an ion implantation system17US 6,239,440 B1Thermoceramix Inc. · 2001
- Device for the ionization of metals having a high melting point, which may be used on ion implanters of the type using ion sources of Freeman or similar type15US 5,144,143 AConsorzio per la Ricerca sulla Microelettronica nel Mezzogiorno · 1992