Method and device for operating a liquid metal-ion source or liquid metal electron source as well as a liquid metal-ion source or liquid metal electron source
AssigneeTechnische UniversitäT Dresden
InventorMartin Tajmar
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Abstract
The invention relates to a liquid metal-ion beam system (1) or liquid metal electron beam system, including: a conductive emitter electrode (2), a conductive extractor electrode (3) opposite to the emitter electrode (2), a liquid metal reservoir (4) which is fluidically connected to the emitter electrode (2) for transporting liquid metal to the emitter electrode (2), a control unit (5) which is configured to apply a periodically varying operating voltage between emitter electrode (2) and extractor electrode (3).
Claims11
A liquid metal-ion beam system or liquid metal electron beam system comprising:
- a conductive emitter electrode,
- a conductive extractor electrode opposite to the emitter electrode,
- a liquid metal reservoir which is fluidically connected to the emitter electrode for transporting liquid metal to the emitter electrode, and
- a control unit which is configured to apply a periodically varying operating voltage between the emitter electrode and the extractor electrode.
A method for operating a liquid metal-ion beam system or liquid metal electron beam system, comprising:
- a conductive emitter electrode,
- a conductive extractor electrode opposite to the emitter electrode,
- a liquid metal reservoir which is fluidically connected to the emitter electrode for transporting liquid metal to the emitter electrode, wherein a periodically varying operating voltage is applied between the emitter electrode and the extractor electrode.
A system comprising a liquid metal-ion beam system and a liquid metal electron beam system, the system comprising:
- a conductive emitter electrode,
- a conductive extractor electrode opposite to the emitter electrode,
- a liquid metal reservoir which is fluidically connected to the emitter electrode for transporting liquid metal to the emitter electrode, and
- a control unit which is configured to apply a periodically varying operating voltage between the emitter electrode and the extractor electrode,
- wherein the control unit applies a positive operating voltage between the emitter electrode and the extractor electrode to emit ions from the emitter electrode,
- wherein the control unit applies a negative operating voltage between the emitter electrode and the extractor electrode to emit electrons from the emitter electrode, and
- wherein the operating voltages relate to a same reference potential.
Dependencies are inferred from the claim text.