H01J 27/026
Cluster ion sources
Official title: {Cluster ion sources}
H01J27/026 (Cluster ion sources) appears on 33 US grants and 42 published applications in this corpus.
Search patents in H01J- Granted patents
- 33
- Published applications
- 42
- Assignees
- 29
- Inventors
- 73
- Latest grant
- 22 Jul 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 2 |
| 2002 | 0 | 2 |
| 2003 | 3 | 0 |
| 2004 | 1 | 0 |
| 2005 | 0 | 2 |
| 2006 | 2 | 3 |
| 2007 | 2 | 2 |
| 2008 | 1 | 4 |
| 2009 | 2 | 4 |
| 2010 | 5 | 3 |
| 2011 | 1 | 3 |
| 2012 | 1 | 0 |
| 2013 | 1 | 3 |
| 2014 | 1 | 5 |
| 2015 | 2 | 0 |
| 2016 | 2 | 4 |
| 2017 | 2 | 0 |
| 2018 | 0 | 0 |
| 2019 | 1 | 1 |
| 2020 | 0 | 0 |
| 2021 | 0 | 1 |
| 2022 | 1 | 1 |
| 2023 | 1 | 1 |
| 2024 | 0 | 0 |
| 2025 | 1 | 0 |
| 2026 | 0 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Support body, manufacturing apparatus for support body, and manufacturing method for support body22 Jul 2025US 12,368,034 B2Ayabo Corporation
- Tuning gas cluster ion beam systems1 Aug 2023US 11,715,620 B2Tel Manufacturing and Engineering of America, Inc.
- Systems and methods for providing a beam of charged particles15 Nov 2022US 11,501,943 B2HIL Applied Medical, Ltd.
- Foil sheet assemblies for ion implantation17 Sep 2019US 10,418,223 B1Varian Semiconductor Equipment Associates, Inc.
- Process gas enhancement for beam treatment of a substrate15 Aug 2017US 9,735,019 B2TEL Epion Inc.
- Devices and Methods for Creation of Exotic Vacuum Objects13 Aug 2026US 2026/0237588 A1Magnetic Miles, LLC
- Loaded body, apparatus for producingloaded body and method for producing loaded body29 Jun 2023US 2023/0203642 A1Ayabo Corporation
- Tuning Gas Cluster Ion Beam Systems10 Nov 2022US 2022/0359155 A1Tel Manufacturing and Engineering of America, Inc.
- Systems and methods for providing a beam of charged particles26 Aug 2021US 2021/0265125 A1HIL Applied Medical, Ltd.
- Foil Sheet Assemblies For Ion Implantation3 Oct 2019US 2019/0304738 A1Varian Semiconductor Equipment Associates, Inc.
Most cited
By later US patents
- Method and apparatus for improved processing with a gas-cluster ion beam56US 7,060,989 B2Epion Corporation · 2006
- Method and device for cluster fragmentation55US 7,247,845 B1Max-Planck-Gesellschaft Zur FöRderung Der Wissenschaften E. V. · 2007
- Ionizer and method for gas-cluster ion-beam formation49US 7,173,252 B2Epion Corporation · 2007
- Gas cluster ion beam low mass ion filter30US 6,635,883 B2Epion Corporation · 2003
- Mass separator for ionized cluster beam18US 4,737,637 AHughes Aircraft Company · 1988