Method and apparatus for improved processing with a gas-cluster ion beam
AssigneeEpion Corporation
InventorsDavid R. Swenson, John J. Hautala, Michael E. Mack, Martin D. Tabat, Matthew C. Gwinn
Life of this patent
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Abstract
Apparatus and methods for improving processing of workpieces with gas-cluster ion beams and modifying the gas-cluster ion energy distribution in the GCIB. In a reduced-pressure environment, generating an energetic gas-cluster ion beam and subjecting the beam to increased pressure region.
Claims23
An apparatus for generating a gas-cluster ion beam with a modified gas-cluster ion energy distribution, comprising:
- a reduced-pressure chamber having a reduced-pressure;
- a gas-cluster ion beam source within the chamber, for generating an energetic gas-cluster ion beam having a gas-cluster ion beam path;
- and
- a pressure-controlled region within the reduced-pressure chamber having an average pressure greater than the reduced-pressure;
- wherein at least a portion of the gas-cluster ion beam path traverses the pressure-controlled region so as to be modified by the greater pressure of the pressure-controlled region.
A method of processing a workpiece with a gas-cluster ion beam, comprising the steps of:
- generating a gas-cluster ion beam with a gas-cluster ion beam source within a reduced-pressure chamber;
- accelerating via an accelerator the gas-cluster ion beam to form an energetic gas-cluster ion beam having a beam path;
- holding a workpiece within the reduced-pressure chamber;
- providing an increased-pressure region between the accelerator and the workpiece, wherein at least a portion of the beam path traverses the increased-pressure region.
A method of modifying the gas-cluster ion energy distribution in an accelerated gas-cluster ion beam comprising the steps of:
- generating a gas-cluster ion beam with a gas-cluster ion beam source within a reduced-pressure chamber;
- accelerating with an accelerator within the reduced-pressure chamber the gas-cluster ion beam to form an energetic gas-cluster ion beam having a beam path and a gas-cluster ion energy distribution;
- providing an increased-pressure region in the reduced-pressure chamber;
- directing the energetic gas-cluster ion beam path so as to traverse the increased-pressure region with at least a portion of the gas-cluster ion beam path, producing a gas-cluster ion beam with a modified gas-cluster ion energy distribution.
Dependencies are inferred from the claim text.