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AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorsCraig R. Chaney, Adam M. McLaughlin, James A. Sargent, Joshua M. Abeshaus
Estimating the term…
A foil liner comprising a plurality of foil layers is disclosed. The foil layers may each be an electrically conductive material that are stacked on top of each other. The spacing between adjacent foil layers may create a thermal gradient such that the temperature of the plasma is hotter than the temperature of the ion source chamber. In other embodiments, the foil layers may be assembly to sink the heat from the plasma so that the plasma is cooler than the temperature of the ion source chamber. In some embodiments, gaps or protrusions are disposed on one or more of the foil layers to affect the thermal gradient. In certain embodiments, one or more of the foil layers may be constructed of an insulating material to further affect the thermal gradient. The foil liner may be easily assembled, installed and replaced from within the ion source chamber.
An ion source, comprising:
A foil liner for use within an ion source chamber, comprising a plurality of stacked foil layers, wherein one of the plurality of stacked foil layers comprises a spacer layer.
A foil liner for use within an ion source chamber, comprising a plurality of stacked foil layers, wherein one of the plurality of stacked foil layers comprises an insulating material.
A foil liner for use within an ion source chamber, comprising a plurality of stacked foil layers, wherein one of the plurality of stacked foil layers comprises protrusions to increase a spacing between adjacent foil layers.
An ion source, comprising:
A foil liner for use within an ion source chamber, comprising a plurality of stacked foil layers, wherein the foil liner comprises at least a first foil layer and a second foil layer, wherein the first foil layer and the second foil layer are made from different refractory metals.
Dependencies are inferred from the claim text.