Mass separator for ionized cluster beam
AssigneeHughes Aircraft Company
InventorWolfgang Knauer
Life of this patent
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Abstract
An apparatus for producing a beam of ionized clusters, having a cluster source and an ionizer, includes an electrostatic mass separator which permits only those clusters having a mass greater than a selected value to pass. Unclustered ions and clusters of smaller size are reflected and do not reach the substrate target. The mass separator has a retarding field electrode and an entrance electrode, both in the form of grids with the grid openings aligned. Use of a second electrostatic mass separator allows selection of a narrow range of cluster masses for acceleration against the substrate.
Claims19
A process for selecting particles of a selected mass range from a cluster beam, comprising the steps of:
- ionizing the particles of the cluster beam to produce an ionized cluster beam;
- passing the ionized cluster beam through an electrostatic mass separator, the electrostatic mass separator including means for producing an electrostatic field that permits those particles having masses within the selected mass range to pass therethrough but repels particles having lesser masses, and
- extracting the particles of the selected mass range from the electrostatic mass separator.
Apparatus for producing a beam of ionized clusters, comprising:
- cluster source means for producing a cluster beam, the cluster beam having therein unclustered atoms and loosely bound clusters of atoms of from about 2 to about 10,000 atoms;
- ionizer means for receiving unclustered atoms and clusters from said cluster source means and for ionizing the unclustered atoms and clusters to produce an ionized beam;
- and
- first mass separator means for receiving the ionized beam, passing those clusters having a mass greater than a selected mass, and not passing the remainder of the cluster beam, said first mass separator means including means for creating an electrostatic field that retards the motion of ionized atoms and clusters in the ionized beam.
Apparatus for producing a beam of ionized clusters having masses greater than a selected mass, comprising:
- a cluster source that produces a cluster beam having therein unclustered atoms and loosely bound clusters of atoms of from 2 to about 10,000 atoms;
- an ionizer disposed so as to receive the cluster beam from said cluster source, said ionizer producing a beam of ionized atoms and clusters;
- and
- a first electrostatic mass separator disposed to receive the beam of ionized atoms and clusters from said ionizer, said first mass separator including a retarding field electrode in the form of a grid intercepting the beam of ionized atoms and clusters, so that, upon application of a sufficiently great electrical potential of the same sign as that of the ionization of the ionized cluster beam to said retarding field electrode, clusters of a mass greater than the selected mass pass through the grid to form a beam of ionized clusters having masses greater than the selected mass, and clusters of a mass less than the selected mass do not pass through the grid.
Dependencies are inferred from the claim text.