Loaded body, apparatus for producingloaded body and method for producing loaded body

A manufacturing apparatus for a support body in which nanoclusters are supported on a support, the manufacturing apparatus comprising:

• a nanocluster manufacturing section that produces the nanoclusters in a gas phase;
• and
• a supporting section that causes the support to support the nanoclusters in the gas phase,
• wherein the nanocluster manufacturing section includes:
• a vacuum container;
• a sputtering source that has a target as a cathode, performs magnetron sputtering by pulse discharge, and generates plasma;
• a pulse power source that supplies pulsed power to the sputtering source;
• a first inert gas supply section that supplies a first inert gas to the sputtering source;
• a nanocluster growth cell that is contained in the vacuum container;
• and
• a second inert gas introduction section that introduces a second inert gas into the nanocluster growth cell, and
• wherein the supporting section includes a supporting mechanism that rolls a multitude of supports in the gas phase and sprinkles each of the supports with a multitude of nanoclusters to cause each of the supports to support the multitude of nanoclusters.

A manufacturing method for a support body in which nanoclusters are supported on a support, the manufacturing method comprising:

• a first process of producing the nanoclusters in a gas phase;
• and
• a second process of causing the support to support the nanoclusters in the gas phase, wherein
• in the first process, the nanoclusters are produced using an apparatus including:
• a vacuum container;
• a sputtering source that has a target as a cathode, performs magnetron sputtering by pulse discharge, and generates plasma;
• a pulse power source that supplies pulsed power to the sputtering source;
• a first inert gas supply section that supplies a first inert gas to the sputtering source;
• a nanocluster growth cell that is contained in the vacuum container;
• and
• a second inert gas introduction section that introduces a second inert gas into the nanocluster growth cell, and
• in the second process, a multitude of supports are rolled in the gas phase and each of the supports is sprinkled with a multitude of nanoclusters to cause each of the supports to support the multitude of nanoclusters.