Inductively-coupled toroidal plasma source

A method for dissociating gases, the method comprising:

• a. confining a gas in a plasma chamber at a pressure;
• b. generating a first and a second current with a first and a second solid state AC switching power supply, respectively;
• and
• c. inducing a combined AC potential inside the plasma chamber by passing the first current though a first primary winding having a first magnetic core surrounding a first portion of the plasma chamber, and by passing the second current though a second primary winding having a second magnetic core surrounding a second portion of the plasma chamber, the combined induced AC potential directly forming a toroidal plasma that completes a secondary circuit of the transformer and dissociates the gas.

A method for cleaning a process chamber, the method comprising:

• a. confining a gas in a plasma chamber comprising a portion of the outer surface of the process chamber;
• b. generating a first and a second current with a first and a second solid state AC switching power supply, respectively;
• c. inducing a combined AC potential inside the plasma chamber by passing the first current though a first primary winding having a first magnetic core surrounding a first portion of the plasma chamber, and by passing the second current though a second primary winding having a second magnetic core surrounding a second portion of the plasma chamber, the combined induced AC potential directly forming a toroidal plasma that completes a secondary circuit of the transformer and dissociates the gas;
• and
• d. directing the dissociated gas into the process chamber, thereby cleaning the process chamber.

A method for reducing surface erosion in a reactive gas source, the method comprising:

• confining a gas in a plasma chamber comprising an electrically conductive material segmented into portions by multiple dielectric regions;
• providing one or more transformers each having a magnetic core surrounding a respective portion of the plasma chamber and having a primary winding;
• inducing an AC potential inside the plasma chamber by supplying an AC current generated by a solid state AC switching power supply, without requiring the use of an impedance matching network, to the primary winding of the one or more transformers, the induced AC potential forming a toroidal plasma inside the plasma chamber that completes a secondary circuit of the one or more transformers and dissociates the gas;
• and
• distributing a plasma loop voltage across multiple dielectric regions to reduce surface erosion in the plasma chamber.

A method for reducing surface erosion in a reactive gas source, the method comprising:

• confining a gas in a plasma chamber segmented into portions by multiple dielectric regions;
• providing a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding;
• inducing an AC potential inside the plasma chamber, by supplying an AC current generated by a solid state AC switching power supply to the primary winding of the transformer, that forms a toroidal plasma inside the plasma chamber that completes a secondary circuit of the transformer and dissociates the gas;
• and
• distributing a plasma loop voltage across multiple dielectric regions to reduce surface erosion in the plasma chamber.

A method for reducing surface erosion in a reactive gas source, the method comprising:

• confining a gas in a plasma chamber segmented into portions by multiple dielectric regions;
• providing a plurality of transformers each having a magnetic core surrounding a respective portion of the plasma chamber and having a primary winding;
• inducing a combined AC potential inside the plasma chamber, by supplying an AC current generated by a solid state AC switching power supply to the primary windings of the transformers, the combined induced AC potential forming a toroidal plasma inside the plasma chamber that completes a secondary circuit of the transformer and dissociates the gas;
• and
• distributing a plasma loop voltage across multiple dielectric regions to reduce surface erosion in the plasma chamber.

A reactive gas source for dissociating gases in a toroidal plasma comprising:

• a plasma chamber comprising multiple dielectric regions that segment the plasma chamber into portions;
• one or more transformers each having a magnetic core surrounding a respective portion of the plasma chamber and a primary winding;
• a gas inlet for providing a feed gas to the plasma chamber;
• and
• a solid state AC switching power supply comprising one or more switching transistors and supplying an AC current to the primary windings of the one or more transformers without requiring the use of an impedance matching network, the AC current in the primary windings inducing a combined AC potential inside the plasma chamber to form the toroidal plasma that completes a secondary circuit of the transformer and dissociates the feed gas, and
• means for distributing a plasma loop voltage in the plasma chamber across multiple dielectric regions to reduce surface erosion in the plasma chamber.

A reactive gas source for dissociating gases in a toroidal plasma comprising:

• a plasma chamber comprising multiple dielectric regions that segment the plasma chamber into portions;
• one or more transformers each having a magnetic core surrounding a portion of the plasma chamber and a primary winding;
• a gas inlet for providing a feed gas to the plasma chamber;
• and
• a solid state AC switching power supply supplying an AC current to the primary windings of the one or more transformers, the AC current in the primary windings inducing a combined AC potential inside the plasma chamber to form the toroidal plasma that completes a secondary circuit of the transformer and dissociates the feed gas, wherein a plasma loop voltage in the plasma chamber is distributed across multiple dielectric regions to reduce surface erosion in the plasma chamber.