H01J 27/16
Using high-frequency excitation
Official title: using high-frequency excitation, e.g. microwave excitation
H01J27/16 (Using high-frequency excitation) appears on 264 US grants and 154 published applications in this corpus.
Search patents in H01J- Granted patents
- 264
- Published applications
- 154
- Assignees
- 144
- Inventors
- 507
- Latest grant
- 21 Apr 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 1 | 0 |
| 1978 | 2 | 0 |
| 1979 | 0 | 0 |
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 1 | 0 |
| 1983 | 3 | 0 |
| 1984 | 0 | 0 |
| 1985 | 2 | 0 |
| 1986 | 8 | 0 |
| 1987 | 6 | 0 |
| 1988 | 9 | 0 |
| 1989 | 8 | 0 |
| 1990 | 4 | 0 |
| 1991 | 7 | 0 |
| 1992 | 4 | 0 |
| 1993 | 5 | 0 |
| 1994 | 5 | 0 |
| 1995 | 1 | 0 |
| 1996 | 8 | 0 |
| 1997 | 7 | 0 |
| 1998 | 5 | 0 |
| 1999 | 9 | 0 |
| 2000 | 7 | 0 |
| 2001 | 6 | 2 |
| 2002 | 6 | 3 |
| 2003 | 6 | 6 |
| 2004 | 10 | 9 |
| 2005 | 6 | 2 |
| 2006 | 1 | 5 |
| 2007 | 7 | 6 |
| 2008 | 5 | 3 |
| 2009 | 8 | 9 |
| 2010 | 3 | 13 |
| 2011 | 7 | 13 |
| 2012 | 4 | 9 |
| 2013 | 8 | 5 |
| 2014 | 18 | 13 |
| 2015 | 7 | 9 |
| 2016 | 9 | 5 |
| 2017 | 14 | 11 |
| 2018 | 7 | 7 |
| 2019 | 10 | 6 |
| 2020 | 1 | 2 |
| 2021 | 2 | 5 |
| 2022 | 4 | 3 |
| 2023 | 4 | 6 |
| 2024 | 3 | 0 |
| 2025 | 3 | 2 |
| 2026 | 2 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Mixed-gas species plasma source system21 Apr 2026US 12,609,276 B2FEI Company
- Negative ion source and negative ion generation method24 Feb 2026US 12,558,663 B2Japan Atomic Energy Agency
- Ion source, circular accelerator using same, and particle beam therapy system3 Jun 2025US 12,324,088 B2Hitachi, Ltd.
- Accelerator and particle therapy system25 Mar 2025US 12,261,011 B2Hitachi High-Tech Corporation
- Anti-breakdown ion source discharge apparatus4 Mar 2025US 12,243,713 B2Jiangsu Leuven Instruments Co. Ltd
- Mixed-gas species plasma source system26 Jun 2025US 2025/0210303 A1FEI Company
- System and method for spectrometry of a sample in a plasma15 May 2025US 2025/0159789 A1FEI Company
- Plasma processing apparatus30 Nov 2023US 2023/0386801 A1Kyoto Institute of Technology
- Synchronous Polyphase Alternating Current Electrostatic Ion Thruster (SPACE-IT) for propulsion of spacecraft, such as for example satellites, mini-rockets, etc.2 Nov 2023US 2023/0348114 A1
- Accelerator and particle therapy system7 Sep 2023US 2023/0282436 A1Hitachi, Ltd.
Most cited
By later US patents
- Ion source having auxillary ion chamber423US 5,107,170 ANissin Electric Co., Ltd. · 1992
- Toroidal low-field reactive gas source362US 6,150,628 AApplied Science and Technology, Inc. · 2000
- Inductively-coupled toroidal plasma source162US 6,815,633 B1Applied Science and Technology, Inc. · 2004
- Method for producing recording media having protective overcoats of highly tetrahedral amorphous carbon122US 5,858,477 AAkashic Memories Corporation · 1999
- Ion generating apparatus and method for the use thereof115US 4,507,588 ABoard of Trustees operating Michigan State University · 1985