Anti-breakdown ion source discharge apparatus

An anti-breakdown ion source discharge apparatus, comprising a discharge chamber, wherein the discharge chamber is sleeved with an ion source chamber;

• and a region configured to place a discharge component is enclosed between the discharge chamber and the ion source chamber;
• the discharge component includes a radio-frequency coil, a lower conductive connecting part and an upper conductive connecting part;
• the radio-frequency coil is sleeved on an exterior of the discharge chamber;
• and the radio-frequency coil is fixed on a coil support base;
• one end of the lower conductive connecting part is connected to a tail end of the radio-frequency coil through a lower connecting plate, and another end of the lower conductive connecting part is connected to a lower radio-frequency column;
• and the lower radio-frequency column is fixed on an inner wall at a bottom of the ion source chamber;
• and
• one end of the upper conductive connecting part is connected to a head end of the radio-frequency coil through an upper connecting plate, and another end of the upper conductive connecting part is connected to an upper radio-frequency column;
• and the upper radio-frequency column is fixed on the inner wall at the bottom of the ion source chamber;
• wherein the apparatus further includes:
• a coil support configured to support the radio-frequency coil and arranged along a circumferential direction of the coil support base;
• the coil support base is locked on the inner wall at the bottom of the ion source chamber;
• the radio-frequency coil passes through the coil support;
• the upper conductive connecting part sequentially crosses over the radio-frequency coil and the coil support base from an outside of the radio-frequency coil and extends into a bottom of the discharge chamber through a bottom of the coil support base;
• and
• an upper insulation fixing element configured to fix the upper conductive connecting part, wherein the upper insulation fixing element is sleeved on the upper conductive connecting part and fixed on the inner wall at the bottom of the ion source chamber.