H01J 2237/30416
Handling of data
H01J2237/30416 (Handling of data) appears on 72 US grants and 52 published applications in this corpus.
Search patents in H01J- Granted patents
- 72
- Published applications
- 52
- Assignees
- 31
- Inventors
- 105
- Latest grant
- 26 Aug 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1992 | 2 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 1 | 0 |
| 1996 | 3 | 0 |
| 1997 | 3 | 0 |
| 1998 | 0 | 0 |
| 1999 | 2 | 0 |
| 2000 | 2 | 0 |
| 2001 | 3 | 1 |
| 2002 | 2 | 0 |
| 2003 | 3 | 2 |
| 2004 | 0 | 1 |
| 2005 | 2 | 2 |
| 2006 | 1 | 0 |
| 2007 | 1 | 1 |
| 2008 | 1 | 3 |
| 2009 | 0 | 2 |
| 2010 | 3 | 2 |
| 2011 | 1 | 1 |
| 2012 | 2 | 0 |
| 2013 | 2 | 1 |
| 2014 | 1 | 1 |
| 2015 | 4 | 1 |
| 2016 | 1 | 2 |
| 2017 | 3 | 14 |
| 2018 | 8 | 5 |
| 2019 | 6 | 4 |
| 2020 | 5 | 2 |
| 2021 | 3 | 2 |
| 2022 | 3 | 1 |
| 2023 | 2 | 2 |
| 2024 | 0 | 0 |
| 2025 | 1 | 1 |
| 2026 | 0 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Charged particle beam device26 Aug 2025US 12,400,827 B2Hitachi High-Tech Corporation
- Ion implanter and model generation method21 Nov 2023US 11,823,863 B2Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Data generation method and charged particle beam irradiation device5 Sep 2023US 11,749,499 B2NuFlare Technology, Inc.
- Ion implanter and model generation method13 Dec 2022US 11,527,381 B2Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Methods and systems for forming a pattern on a surface using multi-beam charged particle beam lithography1 Mar 2022US 11,264,206 B2D2S, Inc.
- Ion implanter and ion implantation method24 Sep 2026US 2026/0290748 A1Sumitomo Heavy Industries Material Solutions Co., Ltd.
- Method for generating writing data, writing data generation apparatus, method of charged-particle beam writing, charged-particle beam writing apparatus, and computer-readable recording medium17 Jul 2025US 2025/0232950 A1NuFlare Technology, Inc.
- Charged particle beam device31 Aug 2023US 2023/0274907 A1Hitachi High-Tech Corporation
- Ion implanter and model generation method9 Feb 2023US 2023/0038439 A1Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Data generation method and charged particle beam irradiation device24 Mar 2022US 2022/0093360 A1NuFlare Technology, Inc.
Most cited
By later US patents
- Method of probing a net of an IC at an optimal probe-point121US 5,530,372 ASchlumberger Technologies, Inc. · 1996
- Optimal probe point placement113US 5,675,499 ASchlumberger Technologies, Inc. · 1997
- Graphical automated machine control and metrology52US 6,889,113 B2FEI Company · 2005
- Charged particle beam exposure system and method26US 5,528,048 AFujitsu Limited · 1996
- E-beam control data compaction system and method24US 5,251,140 AInternational Business Machines Corporation · 1993