Data generation method and charged particle beam irradiation device
AssigneeNuFlare Technology, Inc.
InventorKenichi YASUI
Life of this patent
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Abstract
In one embodiment, a data generation method is for calculating a coverage of a polygon in each of a plurality of pixels obtained by dividing a target to be irradiated with a charged particle beam into predetermined sizes. The method includes dividing a parametric curve that defines a pattern shape into a plurality of parametric curves, calculating, for each of the plurality of parametric curves, an area of a region surrounded by a segment connecting end points among control points of the parametric curve and the parametric curve, calculating positions of vertexes of a figure having an area equivalent to the calculated area and having, as one side thereof, the segment connecting the end points, and generating the polygon by using the vertexes.
Claims20
A data generation method for calculating a coverage of a polygon in each of a plurality of pixels obtained by dividing a target to be irradiated with a charged particle beam into predetermined sizes, comprising:
- dividing a parametric curve that defines a pattern shape into a plurality of parametric curves;
- calculating, for each of the plurality of parametric curves, an area of a region surrounded by a segment connecting end points among control points of the parametric curve and the parametric curve;
- calculating positions of vertexes of a figure having an area equivalent to the calculated area and having, as one side thereof, the segment connecting the end points;
- and
- generating the polygon by using the vertexes.
A charged particle beam irradiation device comprising:
- an irradiation unit irradiating a target with a charged particle beam;
- and
- a control unit dividing a parametric curve that defines a pattern shape into a plurality of parametric curves, calculating, for each of the plurality of parametric curves, an area of a region surrounded by a segment connecting end points among control points of the parametric curve and the parametric curve, calculating positions of vertexes of a figure having an area equivalent to the calculated area and having, as one side thereof, the segment connecting the end points, generating a polygon by using the vertexes, calculating a coverage of the polygon in each of a plurality of pixels obtained by dividing a target to be irradiated with the charged particle beam into predetermined sizes, calculating an irradiation amount of each of the plurality of pixels on a basis of the coverage, and controlling the irradiation unit to emit the calculated irradiation amount.
A data generation method for calculating a coverage of a polygon in each of a plurality of pixels obtained by dividing a target to be irradiated with a charged particle beam into predetermined sizes, comprising:
- dividing a parametric curve that defines a pattern shape into a plurality of parametric curves;
- generating, for each pass of multiple writing of the charged particle beam, the polygon whose shape differs from one pass to another by using control points that differ from one pass to another among a plurality of control points corresponding to each of the plurality of parametric curves;
- and
- calculating the coverage of the polygon for each pass.
A charged particle beam irradiation device comprising:
- an irradiation unit irradiating a target with a charged particle beam;
- and
- a control unit dividing a parametric curve that defines a pattern shape into a plurality of parametric curves, generating, for each pass of multiple writing of the charged particle beam, the polygon whose shape differs from one pass to another by using at least one of a plurality of control points corresponding to each of the plurality of parametric curves, calculating, for each pass, a coverage of the polygon in each of a plurality of pixels obtained by dividing a target to be irradiated with the charged particle beam into predetermined sizes, calculating an irradiation amount of each of the plurality of pixels on a basis of the coverage, and controlling the irradiation unit to emit the calculated irradiation amount.
Dependencies are inferred from the claim text.