H01J 2237/2555
Microprobes, i.e. particle-induced x-ray spectrometry
Official title: Microprobes, i.e. particle-induced X-ray spectrometry
H01J2237/2555 (Microprobes, i.e. particle-induced x-ray spectrometry) appears on 92 US grants and 70 published applications in this corpus.
Search patents in H01J- Granted patents
- 92
- Published applications
- 70
- Assignees
- 47
- Inventors
- 171
- Latest grant
- 7 Jul 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 1 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 1 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 2 | 0 |
| 1998 | 5 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 1 | 0 |
| 2002 | 4 | 1 |
| 2003 | 5 | 3 |
| 2004 | 8 | 2 |
| 2005 | 2 | 2 |
| 2006 | 3 | 2 |
| 2007 | 2 | 16 |
| 2008 | 1 | 3 |
| 2009 | 18 | 7 |
| 2010 | 4 | 2 |
| 2011 | 2 | 2 |
| 2012 | 2 | 1 |
| 2013 | 2 | 0 |
| 2014 | 2 | 3 |
| 2015 | 3 | 5 |
| 2016 | 3 | 4 |
| 2017 | 3 | 2 |
| 2018 | 1 | 0 |
| 2019 | 2 | 2 |
| 2020 | 2 | 4 |
| 2021 | 2 | 1 |
| 2022 | 2 | 3 |
| 2023 | 2 | 1 |
| 2024 | 1 | 1 |
| 2025 | 1 | 1 |
| 2026 | 1 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Information processing system and phase analysis system7 Jul 2026US 12,676,287 B2Hitachi, Ltd.
- 3D metrology from 3D datacube created from stack of registered images obtained during delayering of the sample8 Apr 2025US 12,272,518 B2Applied Materials Israel Ltd.
- Method of examining a sample using a charged particle microscope30 Apr 2024US 11,971,372 B2FEI Company
- 3D metrology from 3D datacube created from stack of registered images obtained during delayering of the sample15 Aug 2023US 11,728,126 B2Applied Materials Israel Ltd.
- X-ray detection apparatus and method11 Jul 2023US 11,699,567 B2JEOL Ltd.
- Analyzer and Analysis Method27 Aug 2026US 2026/0251596 A1JEOL Ltd.
- Preventing esd in prt sem discharges7 May 2026US 2026/0128251 A1
- 3d metrology from 3d datacube created from stack of registered images obtained during delayering of the sample26 Jun 2025US 2025/0210301 A1Applied Materials Israel Ltd.
- Information processing system and phase analysis system13 Jun 2024US 2024/0192152 A1Hitachi, Ltd.
- 3d metrology from 3d datacube created from stack of registered images obtained during delayering of the sample19 Oct 2023US 2023/0335370 A1Applied Materials Israel Ltd.
Most cited
By later US patents
- Ion sources, systems and methods93US 7,554,096 B2ALIS Corporation · 2009
- Ion sources, systems and methods67US 7,554,097 B2ALIS Corporation · 2009
- Ion sources, systems and methods65US 7,557,359 B2ALIS Corporation · 2009
- Ion sources, systems and methods64US 7,557,358 B2ALIS Corporation · 2009
- Ion sources, systems and methods63US 7,557,360 B2ALIS Corporation · 2009