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US 11,699,567 B2Granted
X-ray detection apparatus and method
AssigneeJEOL Ltd.
InventorTakanori Murano
Life of this patent
Estimating the term…
Abstract
A mask member is provided at an entrance opening of a mirror unit. Of a first diffraction grating and a second diffraction grating, when the second diffraction grating is used, the mask member masks preceding mirrors. With this process, aberration caused by reflective X-ray is suppressed. When the first diffraction grating is used, the mask member does not function. Alternatively, the mask member and another mask member may be selectively used.
Claims8
An X-ray detection apparatus comprising:
- a mirror unit comprising a reflective surface which applies light collection on an X-ray from an observation point on a sample;
- a spectroscopic device that applies spectral dispersion on the X-ray from the mirror unit, to thereby generate a dispersed X-ray which is spatially spread;
- an X-ray detector that detects the dispersed X-ray;
- and
- a mask member that is provided between the observation point and the mirror unit, and that partially covers the reflective surface, to thereby limit a reflective X-ray which is reflected by the reflective surface and reaches the spectroscopic device, wherein
- the spectroscopic device comprises a first diffraction grating and a second diffraction grating which are selectively used,
- the first diffraction grating is placed at a first position when the first diffraction grating is used,
- the second diffraction grating is placed at a second position shifted from the first position in a first direction when the second diffraction grating is used, and
- the mask member limits the reflective X-ray reaching the second diffraction grating.
6 more elements
An X-ray detection apparatus comprising:
- a mirror unit comprising a reflective surface which applies light collection on an X-ray from an observation point on a sample;
- a spectroscopic device that applies spectral dispersion on the X-ray from the mirror unit, to thereby generate a dispersed X-ray which is spatially spread;
- an X-ray detector that detects the dispersed X-ray;
- and
- a mask member that is provided between the observation point and the mirror unit, and that partially covers the reflective surface, to thereby limit a reflective X-ray which is reflected by the reflective surface and reaches the spectroscopic device, wherein
- the mask member is a first mask member which functions when the sample is observed, and
- the X-ray detection apparatus further comprises:
- a second mask member that is provided between the observation point and the spectroscopic device, that functions during calibration, and that allows a direct X-ray from the observation point to reach the spectroscopic device, and prevents the reflective X-ray from the reflective surface from reaching the spectroscopic device;
- and
- a mechanism that causes the first mask member and the second mask member to selectively function.
7 more elements
A method of detecting an X-ray, the method comprising:
- applying, with a mirror unit, light collection on an X-ray from an observation point on a sample;
- applying, with a spectroscopic device that comprises a first diffraction grating and a second diffraction grating which are selectively used, spectral dispersion on an X-ray from the mirror unit by placing the first diffraction grating at a first position when the first diffraction grating is used and placing the second diffraction grating at a second position shifted from the first position in a first direction when the second diffraction grating is used, to thereby generate a dispersed X-ray which is spatially spread;
- detecting the dispersed X-ray;
- and
- covering, with a mask member and at a location between the observation point and the mirror unit, a portion, of a reflective surface of the mirror unit, which causes an aberration, to thereby limit a reflective X-ray which is reflected by the reflective surface and reaches the second diffraction grating of the spectroscopic device.
2 more elements
Dependencies are inferred from the claim text.