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US 7,557,358 B2Granted
Ion sources, systems and methods
AssigneeALIS Corporation
InventorsBilly W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill
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Abstract
Ion sources, systems and methods are disclosed.
Claims71
A system, comprising:
- an ion source capable of interacting with a gas to generate an ion beam that can interact with a sample to cause multiple different types of particles to leave the sample;
- and
- at least one detector configured to detect at least two different types of particles of the multiple different types of particles,
- wherein the multiple different types of particles are selected from the group consisting of secondary electrons, Auger electrons, secondary ions, secondary neutral particles, primary neutral particles, scattered ions and photons.
1 more element
A method, comprising:
- interacting an ion beam with a sample to cause multiple different types of particles to leave the sample;
- and
- detecting at least two different types of particles of the multiple different types of particles,
- wherein the multiple different types of particles are selected from the group consisting of secondary electrons, Auger electrons, secondary ions, secondary neutral particles, primary neutral particles, scattered ions and photons.
1 more element
A method, comprising:
- generating an ion beam by interacting a gas with a gas field ion source;
- interacting the ion beam with a sample to cause particles to leave the sample, the particles being selected from the group consisting of Auger electrons, secondary ions, secondary neutral particles, primary neutral particles, scattered ions and photons;
- and
- detecting at least some of the particles to determine information about the sample.
1 more element
A system, comprising:
- a gas field ion source capable of interacting with a gas to generate an ion beam that can interact with a sample to cause particles to leave the sample, the particles being selected from the group consisting of Auger electrons, secondary ions, secondary neutral particles, primary neutral particles, scattered ions and photons;
- and
- at least one detector configured so that, during use, the at least one detector detects at least some of the particles to determine information about the sample.
Dependencies are inferred from the claim text.