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US 7,554,097 B2Granted
Ion sources, systems and methods
AssigneeALIS Corporation
InventorsBilly W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill
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Abstract
Ion sources, systems and methods are disclosed.
Claims82
A system, comprising:
- a gas field ion source capable of interacting with a gas to generate an ion beam that can interact with a sample to cause ions to leave the sample;
- and
- at least one detector configured so that, during use, the at least one detector can detect the ions,
- wherein the interaction of the ion beam with the sample may cause secondary electrons to leave the sample, and, when the interaction of the ion beam with the sample causes secondary electrons to leave the sample, the at least one detector can detect at least some of the ions without detecting the secondary electrons.
1 more element
A system, comprising:
- a gas field ion source capable of interacting with a gas to generate an ion beam that can interact with a sample to cause neutral particles to leave the sample;
- and
- at least one detector configured so that, during use, the at least one detector can detect the neutral particles,
- wherein the interaction of the ion beam with the sample may cause secondary electrons to leave the sample, and, when the interaction of the ion beam with the sample causes secondary electrons to leave the sample, the at least one detector can detect at least some of the neutral particles without detecting the secondary electrons.
1 more element
A system, comprising:
- a gas field ion source capable of interacting with a gas to generate an ion beam that can interact with a sample to cause photons to leave the sample;
- and
- at least one detector configured so that, during use, the detector can detect the photons,
- wherein the interaction of the ion beam with the sample may cause secondary electrons to leave the sample, and, when the interaction of the ion beam with the sample causes secondary electrons to leave the sample, the at least one detector can detect at least some of the photons without detecting the secondary electrons.
1 more element
Dependencies are inferred from the claim text.