3D metrology from 3D datacube created from stack of registered images obtained during delayering of the sample

A non-transitory computer-readable memory that stores a plurality of computer-readable instructions for evaluating a region of a sample that includes different materials with different known milling rates by:

• positioning the sample within in a vacuum chamber of an evaluation tool that includes a scanning electron microscope (SEM) column and a focused ion beam (FIB) column;
• acquiring a plurality of two-dimensional images of the region of interest by alternating a sequence of delayering the region of interest with a charged particle beam from the FIB column and imaging a surface of the region of interest with the SEM column;
• and
• generating a three-dimensional data cube representing the region of interest by stacking the plurality of two-dimensional images and also adjusting for estimated distortions identified based on locations of the different materials within the region of interest and differences in the known milling rates of the different materials;
• segmenting the data cube into a plurality of uniform regions;
• performing chemical composition measurements of each of the plurality of uniform regions;
• and
• adding results of the chemical composition measurements to the three-dimensional data cube.

A system for evaluating a region of a sample that includes different materials with different known milling rates, the system comprising:

• a vacuum chamber;
• a sample support configured to hold a sample within the vacuum chamber during a sample evaluation process;
• a focused ion beam (FIB) column configured to direct a charged particle beam into the vacuum chamber toward the sample;
• a scanning electron microscope (SEM) column configured to direct a charged particle beam into the vacuum chamber toward the sample;
• and
• a processor and a memory coupled to the processor, the memory including a plurality of computer-readable instructions that, when executed by the processor, cause the system to:
• position the sample within in a vacuum chamber of an evaluation tool that includes a scanning electron microscope (SEM) column and a focused ion beam (FIB) column;
• acquire a plurality of two-dimensional images of the region of interest by alternating a sequence of delayering the region of interest with a charged particle beam from the FIB column and imaging a surface of the region of interest with the SEM column;
• and
• generate a three-dimensional data cube representing the region of interest by stacking the plurality of two-dimensional images and also adjusting for estimated distortions identified based on locations of the different materials within the region of interest and differences in the known milling rates of the different materials;
• segment the data cube into a plurality of uniform regions;
• perform chemical composition measurements of each of the plurality of uniform regions;
• and
• add results of the chemical composition measurements to the three-dimensional data cube.