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US 7,557,359 B2Granted
Ion sources, systems and methods
AssigneeALIS Corporation
InventorsBilly W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill
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Abstract
Ion sources, systems and methods are disclosed.
Claims112
A system, comprising:
- a gas field ion source capable of interacting with a gas to generate an ion beam having a spot size with a dimension of 10 nm or less at a surface of a sample.
A system, comprising:
- an ion source capable of interacting with a gas to generate an ion beam having a spot size with a dimension of three nm or less at a surface of a sample.
An ion microscope capable of producing an image of a sample, the sample being different from the ion microscope, the image of the sample having a resolution of three nm or less.
A gas field ion microscope capable of producing an image of a sample, the sample being different from the ion microscope, the image of the sample having a resolution of 10 nm or less.
Dependencies are inferred from the claim text.