Information processing system and phase analysis system
AssigneeHitachi, Ltd.
InventorToshiaki Tanigaki
Life of this patent
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Abstract
An information processing system includes an input unit that receives a structure distribution of a sample and a first phase distribution of an electron beam, X-ray, light or neutron beam transmitted through the sample, a processing unit that computes a second phase distribution based on the structure distribution and computes an electromagnetic field component of the sample based on the first phase distribution and the second phase distribution, and an output unit that outputs the electromagnetic field component.
Claims15
An information processing system comprising:
- an input unit that receives a structure distribution of a sample and a first phase distribution of an electron beam, X-ray, light or neutron beam transmitted through the sample;
- a processing unit that computes a second phase distribution based on the structure distribution and computes an electromagnetic field component of the sample based on the first phase distribution and the second phase distribution;
- and
- an output unit that outputs the electromagnetic field component.
A phase analysis system including an electron microscope and a control device for controlling the electron microscope, wherein
- the electron microscope includes
- an electron source that irradiates a sample with an electron beam, and
- an annular detector that detects scattered electrons scattered by the sample and outputs ADF data, and
- a detector that detects an electron beam transmitted through the sample and outputs DPC data, and
- the control device
- computes a structural phase distribution of the sample based on the ADF data,
- computes a structural phase differential value based on the structural phase distribution, and
- performs a computation of removing the structural phase differential value from the DPC data to compute a differential value of an electromagnetic field phase distribution.
A phase analysis system including an electron microscope and a control device for controlling the electron microscope, wherein
- the electron microscope includes
- an electron source that irradiates a sample with an electron beam,
- an energy dispersive X-ray spectrometer that outputs EDX data, and
- a detector that detects an electron beam transmitted through the sample and outputs DPC data, and
- the control device
- computes a structural phase distribution of the sample based on the EDX data,
- computes a structural phase differential value based on the structural phase distribution, and
- performs a computation of removing the structural phase differential value from the DPC data to compute a differential value of a potential distribution.
Dependencies are inferred from the claim text.