H01J 2237/2516
Secondary particles mass or energy spectrometry
H01J2237/2516 (Secondary particles mass or energy spectrometry) appears on 75 US grants and 46 published applications in this corpus.
Search patents in H01J- Granted patents
- 75
- Published applications
- 46
- Assignees
- 60
- Inventors
- 161
- Latest grant
- 14 Apr 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 5 | 0 |
| 1993 | 2 | 0 |
| 1994 | 4 | 0 |
| 1995 | 3 | 0 |
| 1996 | 4 | 0 |
| 1997 | 0 | 0 |
| 1998 | 2 | 0 |
| 1999 | 4 | 0 |
| 2000 | 3 | 0 |
| 2001 | 2 | 1 |
| 2002 | 2 | 2 |
| 2003 | 2 | 3 |
| 2004 | 3 | 1 |
| 2005 | 3 | 6 |
| 2006 | 3 | 1 |
| 2007 | 3 | 1 |
| 2008 | 1 | 3 |
| 2009 | 1 | 1 |
| 2010 | 4 | 1 |
| 2011 | 2 | 1 |
| 2012 | 1 | 2 |
| 2013 | 2 | 2 |
| 2014 | 2 | 1 |
| 2015 | 0 | 1 |
| 2016 | 1 | 2 |
| 2017 | 3 | 1 |
| 2018 | 0 | 0 |
| 2019 | 0 | 2 |
| 2020 | 3 | 4 |
| 2021 | 3 | 4 |
| 2022 | 1 | 0 |
| 2023 | 3 | 2 |
| 2024 | 1 | 0 |
| 2025 | 0 | 2 |
| 2026 | 1 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Joint nanoscale three-dimensional imaging and chemical analysis14 Apr 2026US 12,601,698 B2Luxembourg Institute of Science and Technology (List)
- Methods and systems including pulsed dual-beam charge neutralization27 Feb 2024US 11,915,901 B2Ulvac-Phi, Inc.
- Variable reduction ratio spherical aberration correction electrostatic lens, wide angle energy analyzer, and two-dimensional electron spectrometer17 Oct 2023US 11,791,148 B2University Corporation National Nara Institute of Science and Technology
- Joint nanoscale three-dimensional imaging and chemical analysis7 Mar 2023US 11,598,734 B2Luxembourg Institute of Science and Technology (List)
- Multiple beam secondary ion mass spectrometry device3 Jan 2023US 11,545,352 B2Luxembourg Institute of Science and Technology (List)
- Analyzer and Analysis Method27 Aug 2026US 2026/0251596 A1JEOL Ltd.
- Techniques for electron energy loss spectroscopy at high energy losses with magnetic immersion objective12 Mar 2026US 2026/0071977 A1
- Beam synchronization in microscopy13 Nov 2025US 2025/0349492 A1FEI Company
- Temporal characterization of oscillator signals in charged particle microscopy13 Nov 2025US 2025/0349505 A1FEI Company
- Methods and systems including pulsed dual-beam charge neutralization3 Aug 2023US 2023/0245848 A1Ulvac-Phi, Inc.
Most cited
By later US patents
- Method and apparatus for enhancing yield of secondary ions65US 6,414,307 B1FEI Company · 2002
- Particle analyzer apparatus and method55US 5,128,543 ACharles Evans & Associates · 1992
- Process for analysis of a sample34US 6,078,045 AAtomika Instruments GmbH · 2000
- Scanning and high resolution x-ray photoelectron spectroscopy and imaging31US 5,315,113 AThe Perkin-Elmer Corporation · 1994
- Surface analyzing and processing apparatus27US 5,440,122 ASeiko Instruments Inc. · 1995