Methods and systems including pulsed dual-beam charge neutralization
AssigneeUlvac-Phi, Inc.
InventorsScott R. Bryan, Gregory L. Fisher, David H. Narum, Ronald E. Negri
Life of this patent
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Abstract
Surface imaging apparatuses, surface analysis apparatuses, methods based on detection of secondary electrons or secondary ions that include a spatially scanned and DC or pulsed primary excitation source resulting in secondary electrons or secondary ions which are detected and provide the modulated signal for imaging of the sample; and dual polarity flood beams to effect neutralization of surface charge and surface potential variation.
Claims26
A surface imaging apparatus based on detection of secondary electrons or secondary ions, comprising:
- a spatially scanned and DC primary excitation source resulting in secondary electrons or secondary ions which are detected and provide the modulated signal for imaging of the sample;
- a source of a pulsed positive ion flood neutralizer beam;
- a source of an electron flood neutralizer beam;
- and
- independent columns for the positive ion flood neutralizer beam and the electron flood neutralizer beam,
- wherein the source of a pulsed positive ion flood neutralizer beam and the source of an electron flood neutralizer beam are independently controllable and provide dual polarity flood beams to effect neutralization of surface charge and surface potential variation,
- wherein the dual polarity flood beams comprise an electron beam and a positively charged ion beam and at least the positively charged ion beam is pulsed.
A surface imaging apparatus based on detection of secondary electrons or secondary ions, comprising:
- a spatially scanned and pulsed primary excitation source resulting in secondary electrons or secondary ions which are detected and provide the modulated signal for imaging of the sample;
- a source of a pulsed positive ion flood neutralizer beam;
- a source of a pulsed electron flood neutralizer beam;
- and
- independent columns for the positive ion flood neutralizer beam and the electron flood neutralizer beam,
- wherein the source of a pulsed positive ion flood neutralizer beam and the source of an electron flood neutralizer beam are independently controllable and provide dual polarity flood beams to effect neutralization of surface charge and surface potential variation, wherein the pulsed charge neutralizing flood beams are interleaved with the pulsed primary excitation source, and
- wherein the dual polarity flood beams comprise an electron beam and a positively charged ion beam.
A surface analysis apparatus based on energy analysis of secondary electrons or mass analysis of secondary ions, comprising:
- a DC primary excitation source resulting in characteristic secondary electrons to be energy analyzed or secondary ions to be mass analyzed;
- a source of a pulsed positive ion flood neutralizer beam;
- a source of an electron flood neutralizer beam;
- and
- independent columns for the positive ion flood neutralizer beam and the electron flood neutralizer beam,
- wherein the source of a pulsed positive ion flood neutralizer beam and the source of an electron flood neutralizer beam are independently controllable and provide dual polarity flood beams to effect neutralization of surface charge and surface potential variation, and
- wherein the dual polarity flood beams comprise an electron beam and a positively charged ion beam and at least the positively charged ion beam is pulsed.
A surface analysis apparatus based on energy analysis of secondary electrons or mass analysis of secondary ions, comprising:
- a pulsed primary excitation source resulting in characteristic secondary electrons to be energy analyzed or secondary ions to be mass analyzed;
- a source of a pulsed positive ion flood neutralizer beam;
- a source of a pulsed electron flood neutralizer beam;
- and
- independent columns for the positive ion flood neutralizer beam and the electron flood neutralizer beam,
- wherein the source of a pulsed positive ion flood neutralizer beam and the source of an electron flood neutralizer beam are independently controllable and provide dual polarity flood beams to effect neutralization of surface charge and surface potential variation, wherein the dual polarity flood beams are interleaved with the pulsed primary excitation source, and
- wherein the dual polarity flood beams comprise a pulsed electron beam and a pulsed positively charged ion beam.
An ion spectroscopic apparatus comprising:
- a pulsed primary excitation source which generates secondary ions to be mass analyzed, a source of a pulsed positive ion flood neutralizer beam;
- a source of a pulsed electron flood neutralizer beam;
- and
- independent columns for the positive ion flood neutralizer beam and the electron flood neutralizer beam,
- wherein the source of a pulsed positive ion flood neutralizer beam and the source of an electron flood neutralizer beam are independently controllable and provide dual polarity flood beams to effect neutralization of surface charge and surface potential variation, wherein the pulsed charge neutralizing flood beams are interleaved with the pulsed primary excitation source, and
- wherein the dual polarity flood beams comprise a pulsed electron beam and a pulsed positively charged ion beam.
Dependencies are inferred from the claim text.