Joint nanoscale three-dimensional imaging and chemical analysis
AssigneeLuxembourg Institute of Science and Technology (List)
InventorsTom Wirtz, Florian Vollnhals
Life of this patent
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Abstract
A method for in-situ joint nanoscale three-dimensional imaging and chemical analysis of a sample. A single charged particle beam device is used for generating a sequence of two-dimensional nanoscale images of the sample, and for sputtering secondary ions from the sample, which are analysed using a secondary ion mass spectrometry device. The two-dimensional images are combined into a three-dimensional volume representation of the sample, the data of which is combined with the results of the chemical analysis.
Claims13
A method for joint 3D imaging and chemical analysis of a sample comprising:
- a) obtaining a sequence of two-dimensional images of said sample by a device, the sequence of two-dimensional images are based on secondary electron detection, the images of said sequence being taken from different viewing angles, and combining said two-dimensional images into a three-dimensional representation of the sample;
- b) obtaining a representation of a chemical composition of said sample by the device, wherein obtaining the representation of the chemical composition is performed in-situ with obtaining the sequence of two-dimensional images of said sample, wherein during said step b), the sample is irradiated using a second primary charged particle beam, thereby releasing secondary ions from the sample, and wherein the second primary charged particle beam is an electron beam;
- and
- c) mapping the representation of the chemical composition and the three-dimensional representation of the sample and recording a result in a memory element.
A device for performing joint 3D in-situ imaging and chemical analysis of a sample, the device comprising a memory storing instructions when executed by a processor cause the processor to:
- a) obtain a sequence of two-dimensional images of said sample by the device, the sequence of two-dimensional images are based on secondary electron detection, the images of said sequence being taken from different viewing angles, and combine said two-dimensional images into a three-dimensional representation of the sample;
- b) obtain a representation of a chemical composition of said sample by the device, wherein the representation of the chemical composition is obtained by in-situ performance with obtaining the sequence of two-dimensional images of said sample, wherein during said step b), the sample is irradiated using a second primary charged particle beam, to release secondary ions from the sample, and wherein the second primary charged particle beam is an electron beam;
- and
- c) map the representation of the chemical composition and the three-dimensional representation of the sample and record a result in a memory element.
Dependencies are inferred from the claim text.