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US 11,545,352 B2Granted
Multiple beam secondary ion mass spectrometry device
AssigneeLuxembourg Institute of Science and Technology (List)
InventorsMarina Verruno, David Dowsett, Tom Wirtz
Life of this patent
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Abstract
A secondary ion mass spectrometer comprising a primary ion beam device, and means for collecting, mass filtering and subsequently detecting secondary ions released from a sample due to the sample having been impacted by a plurality of primary ion beams. The secondary ion mass spectrometer is remarkable in that it uses a plurality of primary ion beams in parallel for scanning the surface of the sample.
Claims15
A secondary ion mass spectrometer, comprising:
- a primary ion beam device,
- a means for collecting, mass filtering and subsequently detecting secondary ions released from a sample due to the sample having been impacted by a plurality of primary ion beams, wherein the primary ion beam device comprises one primary ion source for generating a first primary ion beam, and an aperture plate comprising at least two apertures, such that the first primary ion beam projects an image of each aperture on the sample, thereby generating one second primary ion beam for each aperture, and
- a means for guiding each second primary ion beam to a distinct location on said sample.
Dependencies are inferred from the claim text.