Scanning and high resolution x-ray photoelectron spectroscopy and imaging

An instrument for analysis of a specimen surface, comprising:

• an electron gun for producing a focused electron beam;
• an anode with an anode surface disposed to receive the focused electron beam so as to generate x-rays;
• rastering means for rastering the focused beam over an array of anode spots on the anode surface whereby the x-rays are generated sequentially from each of the anode spots;
• focusing means receptive of the x-rays from the anode spots for focusing an energy band of the x-rays of predetermined energy as an x-ray spot on the specimen surface, the rastering effecting movement of the x-ray spot over an array of pixel areas on the specimen surface, such that photoelectrons are emitted sequentially from each pixel area with electron energies characteristic of chemical species in such each pixel area, the array of pixel areas corresponding to the array of anode spots;
• analyzer means receptive of the photoelectrons from the sequential pixel areas for analyzing the electron energies;
• display means cooperative with the analyzer means for displaying a mapping of specimen information representative of the electron energies and thereby the chemical species in the array of pixel areas;
• and
• a magnetic immersion lens disposed proximate the specimen surface with the specimen surface interposed between the immersion lens and the analyzer means, so that a magnetic field of the immersion lens collects a substantial portion of the photoelectrons from the specimen surface and directs the substantial portion to the analyzer means.

An instrument for analysis of a specimen surface, comprising:

• an electron gun for producing a focused electron beam;
• an anode with an anode surface disposed to receive the focused electron beam so as to generate x-rays;
• rastering means for rastering the focused beam over an array of anode spots on the anode surface whereby the x-rays are generated sequentially from each of the anode spots;
• focusing means receptive of the x-rays from the anode spots for focusing an energy band of the x-rays of predetermined energy as an x-ray spot on the specimen surface, the rastering effecting movement of the x-ray spot over an array of pixel areas on the specimen surface, such that photoelectrons are emitted sequentially from each pixel area with electron energies characteristic of chemical species in such each pixel area, the array of pixel areas corresponding to the array of anode spots;
• analyzer means receptive of the photoelectrons from the sequential pixel areas for analyzing the electron energies;
• and
• display means cooperative with the analyzer means for displaying a mapping of specimen information representative of the electron energies and thereby the chemical species in the array of pixel areas;
• wherein the focusing means comprises a base member having a polished face with a concave curvature and a monochromator crystal arrangement comprising a plurality of crystal platelets having an uniform thickness and being formed of common material, lattice structure, and crystalline orientation, the crystal platelets having a polished side bonded to the polished face juxtaposed in crystalline alignment so as to assume the concave curvature and form the monochromator.

An instrument for analysis of a specimen surface, comprising:

• an electron gun for producing a focused electron beam;
• an anode with an anode surface disposed to receive the focused electron beam so as to generate x-rays;
• rastering means for rastering the focused beam over an array of anode spots on the anode surface such that the x-rays are generated sequentially from each of the anode spots;
• focusing means receptive of the x-rays from the anode spots for focusing an energy band of the x-rays of predetermined energy as an x-ray spot on the specimen surface, the rastering effecting movement of the x-ray spot sequentially over each pixel area in an array of pixel areas on the specimen surface, such that photoelectrons are emitted from each pixel area with electron energies characteristic of chemical species in such pixel area, the array of pixel areas corresponding to the array of anode spots;
• detector means receptive of the photoelectrons for generating corresponding photoelectron signals;
• and processing means receptive of the photoelectron signals and cooperative with the rastering means means so as to produce a scanning photoelectron image of the specimen surface;
• wherein the focusing means comprises a base member having a polished face with a concave curvature and a monochromator crystal arrangement comprising a plurality of crystal platelets having an uniform thickness and being formed of common material, lattice structure and crystalline orientation, the crystal platelets having a polished side bonded to the polished face juxtaposed in crystalline alignment so as to assume the concave curvature and form the monochromator.

An instrument for analysis of a specimen surface, comprising:

• an electron gun for producing a focused electron beam;
• an anode with an anode surface disposed to receive the focused electron beam so as to generate x-rays;
• rastering means for rastering the focused beam over an array of anode spots on the anode surface such that the x-rays are generated sequentially from each of the anode spots;
• focusing means receptive of the x-rays from the anode spots for focusing an energy band of the x-rays of predetermined energy as an x-ray spot on the specimen surface, the rastering effecting movement of the x-ray spot sequentially over each pixel area in an array of pixel areas on the specimen surface, such that photoelectrons are emitted from each pixel area with electron energies characteristic of chemical species in such pixel area, the array of pixel areas corresponding to the array of anode spots;
• detector means receptive of the photoelectrons for generating corresponding photoelectron signals;
• processing means receptive of the photoelectron signals and cooperative with the rastering means means so as to produce a scanning photoelectron image of the specimen surface;
• and
• a magnetic immersion lens disposed proximate the specimen surface with the specimen surface interposed between the immersion lens and the analyzer means, so that a magnetic field of the immersion lens collects a substantial portion of the photoelectrons from the specimen surface and directs the substantial portion to the analyzer means.