H01J 2237/2441
Semiconductor detectors
Official title: Semiconductor detectors, e.g. diodes
H01J2237/2441 (Semiconductor detectors) appears on 241 US grants and 242 published applications in this corpus.
Search patents in H01J- Granted patents
- 241
- Published applications
- 242
- Assignees
- 103
- Inventors
- 479
- Latest grant
- 11 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 1 | 0 |
| 1978 | 2 | 0 |
| 1979 | 0 | 0 |
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 2 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 2 | 0 |
| 1989 | 1 | 0 |
| 1990 | 1 | 0 |
| 1991 | 2 | 0 |
| 1992 | 1 | 0 |
| 1993 | 3 | 0 |
| 1994 | 2 | 0 |
| 1995 | 2 | 0 |
| 1996 | 4 | 0 |
| 1997 | 4 | 0 |
| 1998 | 5 | 0 |
| 1999 | 3 | 0 |
| 2000 | 1 | 0 |
| 2001 | 1 | 0 |
| 2002 | 2 | 2 |
| 2003 | 1 | 1 |
| 2004 | 2 | 2 |
| 2005 | 0 | 2 |
| 2006 | 6 | 9 |
| 2007 | 6 | 2 |
| 2008 | 6 | 3 |
| 2009 | 4 | 5 |
| 2010 | 3 | 13 |
| 2011 | 7 | 9 |
| 2012 | 8 | 13 |
| 2013 | 15 | 10 |
| 2014 | 13 | 13 |
| 2015 | 12 | 13 |
| 2016 | 9 | 11 |
| 2017 | 16 | 10 |
| 2018 | 8 | 9 |
| 2019 | 12 | 13 |
| 2020 | 9 | 20 |
| 2021 | 13 | 8 |
| 2022 | 13 | 15 |
| 2023 | 13 | 19 |
| 2024 | 8 | 12 |
| 2025 | 10 | 17 |
| 2026 | 7 | 11 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Detector substrate for use in a charged particle multi-beam assessment tool11 Aug 2026US 12,706,272 B2ASML Netherlands B. V.
- Sensing element level circuitry design for electron counting detection device28 Jul 2026US 12,695,051 B2ASML Netherlands B. V.
- Shielded detector for charged particle microscopy19 May 2026US 12,633,496 B2FEI Company
- Material analysis with multiple detectors21 Apr 2026US 12,607,581 B2Oxford Instruments Nanotechnology Tools Limited
- Systems and methods for analyzing a sample using charged particle beams and active pixel control sensors17 Mar 2026US 12,580,150 B2FEI Company
- Semiconductor charged particle detector and methods thereof3 Sep 2026US 2026/0260842 A1ASML Netherlands B. V.
- Particle detector with reduced inter-symbol interference3 Sep 2026US 2026/0260844 A1ASML Netherlands B. V.
- Analyzer and Analysis Method27 Aug 2026US 2026/0251596 A1JEOL Ltd.
- Scanning electron microscope and photomultiplier therefor and method of evaluating a sample27 Aug 2026US 2026/0253835 A1Applied Materials Israel Ltd.
- Charged particle detector for microscopy16 Jul 2026US 2026/0204511 A1ASML Netherlands B. V.
Most cited
By later US patents
- Method of multivariate spectral analysis138US 6,675,106 B1Sandia Corporation · 2004
- Pattern inspection apparatus and electron beam apparatus86US 5,430,292 AFujitsu Limited · 1995
- Testing apparatus using charged particles and device manufacturing method using the testing apparatus76US 7,138,629 B2Ebara Corporation · 2006
- Surface analysis method and apparatus for carrying out the same72US 5,481,109 AHitachi, Ltd. · 1996
- Film thickness measurement using electron-beam induced x-ray microanalysis66US 6,787,773 B1KLA-Tencor Corporation · 2004