Method of multivariate spectral analysis
AssigneeSandia Corporation
InventorsMichael R. Keenan, Paul G. Kotula
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AssigneeSandia Corporation
InventorsMichael R. Keenan, Paul G. Kotula
Estimating the term…
A method of determining the properties of a sample from measured spectral data collected from the sample by performing a multivariate spectral analysis. The method can include: generating a two-dimensional matrix A containing measured spectral data; providing a weighted spectral data matrix D by performing a weighting operation on matrix A; factoring D into the product of two matrices, C and ST, by performing a constrained alternating least-squares analysis of D=CST, where C is a concentration intensity matrix and S is a spectral shapes matrix; unweighting C and S by applying the inverse of the weighting used previously; and determining the properties of the sample by inspecting C and S. This method can be used to analyze X-ray spectral data generated by operating a Scanning Electron Microscope (SEM) with an attached Energy Dispersive Spectrometer (EDS).
A method of determining the properties of a sample from measured spectral data collected from the sample;
A method of determining the properties of a sample from measured spectral data collected from the sample;
A method of determining the properties of a sample from measured spectral data collected from the sample;
A method of determining the properties of a sample from measured spectral data collected from the sample;
A method of determining the properties of a sample, comprising:
Dependencies are inferred from the claim text.