Particle detector with reduced inter-symbol interference

A charged-particle beam apparatus, comprising:

• a charged-particle source configured to emit primary charged particles to be incident on a sample;
• and
• a charged-particle detector configured to detect secondary charged particles generated from the sample upon interaction with the primary charged particles, the charged-particle detector comprising:
• a substrate layer comprising a first surface and a second surface opposite the first surface;
• a charge sensing element formed on the first surface and configured to detect charged particles originating from a sample;
• and
• a plurality of transistors formed in a first region of the second surface of the substrate layer,
• wherein a top surface of each transistor of the plurality of transistors is coplanar with a top surface of the first region and with the second surface of the substrate layer.