US 12,580,150 B2 · Systems and methods for analyzing a sample using charged particle beams and active pixel control sensors

Abstract

Systems and methods taught herein utilize a single detector to provide both unidimensional data (e.g., for direct topographical imaging) and multidimensional data (e.g., for crystallographic data) for a sample that is interrogated with a charged particle beam. In some examples, unidimensional data can include signal intensity due to backscattered electrons received across the entire detector surface while multidimensional data can include signal intensity due to backscattered electrons as a function of pixel position. By obtaining unidimensional data and multidimensional data from a single detector, the unidimensional data and multidimensional data can be obtained at a same location, at a same time, or both at the same location and same time.

Claims20

Dependent claims

A charged particle detector system, comprising:

an active pixel control sensor having a sensor layer and a readout chip and including a plurality of pixels, each pixel in the plurality of pixels producing at least an electron and a hole upon being struck by a charged particle;
a first readout circuit in communication with the sensor layer and configured to receive a unidimensional data signal corresponding to one of the electron or hole produced by the charged particle strike;
and
a second readout circuit in communication with the readout chip and configured to receive a multidimensional data signal corresponding to the other of the electron or hole produced by the charged particle strike.

1 more element

Dependencies are inferred from the claim text.

Systems and methods for analyzing a sample using charged particle beams and active pixel control sensors

Life of this patent

Systems and methods for analyzing a sample using charged particle beams and active pixel control sensors

Life of this patent

Abstract

Claims20