Sensing element level circuitry design for electron counting detection device

A non-transitory computer-readable medium storing a set of instructions that are executable by one or more processors of controller of a charged particle beam apparatus to cause the charged particle beam apparatus to perform a method comprising:

• generating a charged particle beam;
• when a signal representing an output of a sensing element of a detector exceeds a first threshold, integrating the signal representing the output of the sensing element using a first storage cell corresponding to a first charged particle event;
• and
• when the signal representing the output of the sensing element exceeds the first threshold after the first charged particle event, integrating the signal representing the output of the sensing element using a second storage cell corresponding to a second charged particle event.

A detector for a charged particle beam apparatus, comprising:

• a plurality of sensing elements;
• a circuit for each of the sensing elements, the circuit comprising:
• a storage cell configured to receive a signal representing an output of a sensing element;
• a multiplexer configured to selectively feed the signal representing the output of the sensing element to the storage cell;
• a threshold detector including circuitry configured to determine a start of integration corresponding to a charged particle arrival event based on a comparison that indicates that the signal representing the output of the sensing element exceeds a threshold;
• and
• a converter including circuitry configured to determine information about the charged particle arrival event.