Charged particle detector for microscopy

Abstract

A charged particle detector including: an array of sensing elements configured to generate an electrical signal in response to charged particles and arranged in rows; an array of optical modulators each connected to a respective one of the sensing elements and configured to modulate a sensing light beam in response to the electrical signal; a plurality of waveguides configured to direct each of a plurality of sensing light beams through a row of the optical modulators; a beam combiner configured to combine the plurality of sensing light beams having passed through respective rows of the optical modulator into a combined beam; and a read out unit configured to measure the modulation of the combined beam to detect charged particles incident on the sensing elements.

Dependencies are inferred from the claim text.