H01J 2237/2065
Temperature variations
H01J2237/2065 (Temperature variations) appears on 72 US grants and 90 published applications in this corpus.
Search patents in H01J- Granted patents
- 72
- Published applications
- 90
- Assignees
- 52
- Inventors
- 226
- Latest grant
- 4 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1993 | 1 | 0 |
| 1994 | 1 | 0 |
| 1995 | 2 | 0 |
| 1996 | 3 | 0 |
| 1997 | 1 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 2 | 0 |
| 2004 | 0 | 0 |
| 2005 | 0 | 2 |
| 2006 | 1 | 1 |
| 2007 | 2 | 0 |
| 2008 | 2 | 4 |
| 2009 | 1 | 3 |
| 2010 | 1 | 2 |
| 2011 | 2 | 1 |
| 2012 | 1 | 4 |
| 2013 | 0 | 1 |
| 2014 | 6 | 3 |
| 2015 | 3 | 3 |
| 2016 | 3 | 5 |
| 2017 | 2 | 2 |
| 2018 | 2 | 3 |
| 2019 | 0 | 4 |
| 2020 | 4 | 8 |
| 2021 | 5 | 9 |
| 2022 | 4 | 5 |
| 2023 | 7 | 13 |
| 2024 | 7 | 6 |
| 2025 | 4 | 4 |
| 2026 | 4 | 7 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Method and apparatus for continuous chained energy ion implantation4 Aug 2026US 12,700,562 B2Axcelis Technologies, Inc.
- Blended energy implant9 Jun 2026US 12,651,722 B2Axcelis Technologies, Inc.
- Processing method and plasma processing apparatus2 Jun 2026US 12,646,693 B2Tokyo Electron Limited
- Transmission electron microscope in-situ chip and preparation method therefor28 Apr 2026US 12,614,694 B2Xiamen Chip-Nova Technology Co., Ltd.
- Temperature-tuned substrate support for substrate processing systems11 Nov 2025US 12,467,130 B2Lam Research Corporation
- Method and apparatus for continuous chained energy ion implantation1 Oct 2026US 2026/0302126 A1Axcelis Technologies, Inc.
- Blended energy implant17 Sep 2026US 2026/0279718 A1Axcelis Technologies, Inc.
- Processing method and plasma processing apparatus10 Sep 2026US 2026/0269196 A1Tokyo Electron Limited
- System for the continuous-wave laser processing and sem characterisation of a sample20 Aug 2026US 2026/0245827 A1
- Carbon nanotube micro-heating chip and preparation method thereof30 Apr 2026US 2026/0122730 A1Hon Hai Precision Industry Co., Ltd.
Most cited
By later US patents
- System for analyzing surfaces of samples47US 5,619,035 ABiotechnology Research and Development Corporation · 1997
- System for analyzing surfaces of samples43US 5,504,366 ABiotechnology Research and Development Corporation · 1996
- Small cavity analytical instruments41US 5,559,328 ABiotechnology Research and Development Corporation · 1996
- Systems configured to reduce distortion of a resist during a metrology process and systems and methods for reducing alteration of a specimen during analysis41US 7,304,302 B1KLA-Tencor Technologies Corporation · 2007
- Hot stage for scanning probe microscope26US 5,731,587 AThe Regents of the University of Michigan · 1998