Carbon nanotube micro-heating chip and preparation method thereof

A method to prepare a carbon nanotube micro-heating chip, the method comprising:

• S1, providing a substrate comprising a first surface and a second surface;
• S2, applying an insulating layer on the first surface;
• S3, setting seven electrodes and a metal thermometer on a surface of the insulating layer away from the substrate, the seven electrodes comprises a first electrode, a second electrode, a third electrode, a fourth electrode, a fifth electrode, a sixth electrode and a seventh electrode, one end of the third electrode and one end of the fourth electrode are respectively electrically connected to the metal thermometer, and one end of the fifth electrode and one end of the sixth electrode are respectively electrically connected to the metal thermometer;
• S4:
• forming a thorough hole in the substrate penetrating through the first surface and the second surface, forming a widow by suspending the insulating layer overs the through hole;
• S5, forming a plurality of grooves in the window as a sample pool configured for carrying samples, covering a first carbon nanotube layer and a second carbon nanotube layer on the window, and arranging the plurality of grooves between the first carbon nanotube layer and the second carbon nanotube layer, electrically connecting the first carbon nanotube layer and the second carbon nanotube layer via the seventh electrode, electrically connecting the first electrode to the first carbon nanotube layer, and electrically connecting the second electrode to the second carbon nanotube layer.