H01J 2237/1503
Mechanical scanning
H01J2237/1503 (Mechanical scanning) appears on 19 US grants and 22 published applications in this corpus.
Search patents in H01J- Granted patents
- 19
- Published applications
- 22
- Assignees
- 18
- Inventors
- 44
- Latest grant
- 30 Dec 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 1 | 0 |
| 2002 | 1 | 0 |
| 2003 | 0 | 1 |
| 2004 | 0 | 0 |
| 2005 | 1 | 0 |
| 2006 | 0 | 0 |
| 2007 | 0 | 3 |
| 2008 | 0 | 3 |
| 2009 | 2 | 1 |
| 2010 | 2 | 1 |
| 2011 | 4 | 4 |
| 2012 | 0 | 0 |
| 2013 | 2 | 1 |
| 2014 | 0 | 0 |
| 2015 | 1 | 2 |
| 2016 | 1 | 0 |
| 2017 | 0 | 1 |
| 2018 | 1 | 0 |
| 2019 | 0 | 0 |
| 2020 | 0 | 1 |
| 2021 | 0 | 0 |
| 2022 | 0 | 0 |
| 2023 | 0 | 1 |
| 2024 | 0 | 0 |
| 2025 | 1 | 1 |
| 2026 | 0 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Multiple charged particle beam writing method and multiple charged particle beam writing apparatus30 Dec 2025US 12,512,297 B2NuFlare Technology, Inc.
- Charged particle system and methods for irradiating a planning target volume10 Jul 2018US 10,020,161 B2The Trustees of the University of Pennsylvania
- Processing apparatus and method of treating a substrate15 Mar 2016US 9,287,085 B2Varian Semiconductor Equipment Associates, Inc.
- Ion implanter and ion implant method thereof24 Mar 2015US 8,987,691 B2Advanced Ion Beam Technology, Inc.
- Apparatus and method for multi-directionally scanning a beam of charged particles9 Jul 2013US 8,481,959 B2
- Ion implanter and ion implantation method8 Oct 2026US 2026/0311963 A1Chongqing Advanced Silicon Technology Co., LTD
- Vertically mounted processing system26 Feb 2026US 2026/0058109 A1Tokyo Electron Limited
- Electron beam processing methods30 Oct 2025US 2025/0336643 A1Multibeam Corporation
- Multiple charged particle beam writing method and multiple charged particle beam writing apparatus28 Dec 2023US 2023/0420217 A1NuFlare Technology, Inc.
- Method and apparatus for directing a neutral beam16 Jan 2020US 2020/0022247 A1Exogenesis Corporation
Most cited
By later US patents
- Multijunction photovoltaic cells and panels using a silicon or silicon-germanium active substrate cell for space and terrestrial applications199US 6,340,788 B12002
- Low-energy scanning transmission electron microscope58US 4,618,767 AInternational Business Machines Corporation · 1986
- Apparatus and methods for ion beam implantation using ribbon and spot beams14US 7,902,527 B22011
- Method of manufacturing electrically conductive molded bodies by plasma-activated chemical deposition from the gaseous phase13US 4,877,642 AU. S. Philips Corporation · 1989
- Exposure apparatus, method of making the apparatus, exposure method, and device and manufacturing method of the device8US 6,320,195 B1Nikon Corporation · 2001