H01J 2237/1502
Mechanical adjustments
H01J2237/1502 (Mechanical adjustments) appears on 74 US grants and 93 published applications in this corpus.
Search patents in H01J- Granted patents
- 74
- Published applications
- 93
- Assignees
- 42
- Inventors
- 217
- Latest grant
- 14 Apr 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 2 | 1 |
| 2002 | 2 | 0 |
| 2003 | 0 | 1 |
| 2004 | 0 | 1 |
| 2005 | 2 | 1 |
| 2006 | 1 | 3 |
| 2007 | 0 | 3 |
| 2008 | 2 | 4 |
| 2009 | 3 | 1 |
| 2010 | 3 | 2 |
| 2011 | 4 | 6 |
| 2012 | 0 | 2 |
| 2013 | 3 | 2 |
| 2014 | 2 | 3 |
| 2015 | 5 | 10 |
| 2016 | 7 | 4 |
| 2017 | 5 | 4 |
| 2018 | 4 | 3 |
| 2019 | 1 | 1 |
| 2020 | 7 | 11 |
| 2021 | 2 | 6 |
| 2022 | 3 | 1 |
| 2023 | 4 | 4 |
| 2024 | 4 | 3 |
| 2025 | 3 | 7 |
| 2026 | 1 | 9 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Multiple particle beam system with a contrast correction lens system14 Apr 2026US 12,603,245 B2Carl Zeiss MultiSEM GmbH
- Multiple charged particle beam writing method and multiple charged particle beam writing apparatus30 Dec 2025US 12,512,297 B2NuFlare Technology, Inc.
- Apparatus of plural charged-particle beams23 Sep 2025US 12,424,408 B2ASML Netherlands B. V.
- Plasma processing apparatus1 Jul 2025US 12,347,654 B2Tokyo Electron Limited
- Cleaning method and plasma processing apparatus24 Dec 2024US 12,176,187 B2Tokyo Electron Limited
- Ion implanter and ion implantation method8 Oct 2026US 2026/0311963 A1Chongqing Advanced Silicon Technology Co., LTD
- Processing Apparatus and Processing Method9 Jul 2026US 2026/0196446 A1Tokyo Electron Limited
- Jig device and method of mounting focus ring using the same2 Jul 2026US 2026/0188627 A1Semes Co., Ltd.
- Plasma head and plasma generation device11 Jun 2026US 2026/0162934 A1Fuji Corporation
- Segmented focus ring for plasma semiconductor processing and processing tool configured to use the segmented focus ring21 May 2026US 2026/0142134 A1Beijing Naura Microelectronics Equipment Co., Ltd.
Most cited
By later US patents
- Multijunction photovoltaic cells and panels using a silicon or silicon-germanium active substrate cell for space and terrestrial applications199US 6,340,788 B12002
- Low-energy scanning transmission electron microscope58US 4,618,767 AInternational Business Machines Corporation · 1986
- Apparatus of plural charged-particle beams51US 9,922,799 B2Hermes Microvision, Inc. · 2018
- Beam tuning with automatic magnet pole rotation for ion implanters43US 7,476,855 B2Axcelis Technologies, Inc. · 2009
- Pattern definition device with multiple multibeam array43US 8,546,767 B2IMS Nanofabrication GmbH · 2013