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US 2026/0162934 A1Published application
Plasma head and plasma generation device
AssigneeFuji Corporation
InventorsHiroki SANO, Toshiyuki IKEDO, Takuya IWATA
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Abstract
A plasma head includes a cylindrical main body configured to conduct a process gas to be converted into plasma; a pair of electrodes accommodated in the main body and configured to discharge a part of the process gas to generate a plasma gas; and a flow rectifying member having multiple flow rectifying plates configured to make the process gas introduced into the main body and supplied to the pair of electrodes form a spiral flow.
Claims10
A plasma head comprising:
- a cylindrical main body configured to conduct a process gas to be converted into plasma;
- a pair of electrodes accommodated in the main body and configured to discharge a part of the process gas to generate a plasma gas;
- and
- a flow rectifying member having multiple flow rectifying plates configured to make the process gas introduced into the main body and supplied to the pair of electrodes form a spiral flow.
1 more element
Dependencies are inferred from the claim text.