H01J 2237/0807
Gas field ion sources [gfis]
Official title: Gas field ion sources [GFIS]
H01J2237/0807 (Gas field ion sources [gfis]) appears on 154 US grants and 154 published applications in this corpus.
Search patents in H01J- Granted patents
- 154
- Published applications
- 154
- Assignees
- 51
- Inventors
- 206
- Latest grant
- 21 Oct 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 1 | 0 |
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 4 | 0 |
| 1985 | 1 | 0 |
| 1986 | 1 | 0 |
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 1 | 0 |
| 1990 | 4 | 0 |
| 1991 | 1 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 1 | 0 |
| 1996 | 3 | 0 |
| 1997 | 2 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 1 |
| 2003 | 0 | 1 |
| 2004 | 0 | 0 |
| 2005 | 1 | 1 |
| 2006 | 1 | 3 |
| 2007 | 0 | 20 |
| 2008 | 3 | 4 |
| 2009 | 17 | 15 |
| 2010 | 7 | 13 |
| 2011 | 5 | 14 |
| 2012 | 16 | 12 |
| 2013 | 12 | 12 |
| 2014 | 13 | 11 |
| 2015 | 17 | 11 |
| 2016 | 8 | 5 |
| 2017 | 7 | 7 |
| 2018 | 1 | 4 |
| 2019 | 6 | 6 |
| 2020 | 6 | 3 |
| 2021 | 2 | 2 |
| 2022 | 3 | 6 |
| 2023 | 3 | 1 |
| 2024 | 3 | 1 |
| 2025 | 1 | 1 |
By publication year. Applications have been published since 2001.
Recent patents
- Gas ion gun21 Oct 2025US 12,451,320 B2Centre National De La Recherche Scientifique
- Automated operational control of micro-tooling devices24 Dec 2024US 12,176,182 B2Carl Zeiss SMT GmbH
- Ion beam device19 Nov 2024US 12,148,593 B2Hitachi High-Tech Corporation
- Ion beam processing apparatus and method for controlling operation thereof12 Mar 2024US 11,929,238 B2JEOL Ltd.
- Method, device and system for the treatment of biological cryogenic samples by plasma focused ion beams22 Aug 2023US 11,735,404 B2FEI Company
- Editing of deep, multi-layered structures21 Aug 2025US 2025/0266240 A1
- Ion beam device and emitter tip milling method20 Jun 2024US 2024/0203682 A1Hitachi High-Tech Corporation
- A gas ion gun28 Sep 2023US 2023/0307204 A1Centre National De La Recherche Scientifique
- Method for controlling dynamically controllable ultrawide-amplitude and high-response ion source1 Dec 2022US 2022/0384141 A1National University of Defense Technology, People's Liberation Army of China
- Ion source with multiple bias electrodes17 Nov 2022US 2022/0367138 A1Axcelis Technologies, Inc.
Most cited
By later US patents
- Multilayered device micro etching method and system96US 5,055,696 AHitachi, Ltd. · 1991
- Ion sources, systems and methods93US 7,554,096 B2ALIS Corporation · 2009
- Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample88US 8,779,400 B2Hitachi High-Technologies Corporation · 2014
- Processing method and apparatus using focused ion beam generating means79US 5,825,035 AHitachi, Ltd. · 1998
- Processing method using a focused ion beam77US 4,457,803 ATokyo Shibaura Denki Kabushiki Kaisha · 1984