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US 11,929,238 B2Granted
Ion beam processing apparatus and method for controlling operation thereof
AssigneeJEOL Ltd.
InventorsTatsuhito Kimura, Munehiro Kozuka
Life of this patent
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Abstract
At timing t0, a brake gas (raw material gas) starts to be supplied to an ion beam generator, and the brake gas is fed into a turbo molecular pump. After timing t1, a vent valve is opened intermittently to feed atmospheric air into the turbo molecular pump. The brake gas may be different from the raw material gas. The brake gas is supplied using a gas supply system.
Claims7
An ion beam processing apparatus, comprising:
- an ion beam generator that includes an ionization chamber and generates an ion beam for processing a sample;
- a housing having a sample chamber communicating with the ionization chamber;
- a gas supply system that supplies a raw material gas to the ionization chamber;
- a turbo molecular pump that suctions the sample chamber and creates vacuum in the sample chamber and the ionization chamber;
- and
- a controller that controls the gas supply system by supplying a brake gas which is identical to or different from the raw material gas into the ionization chamber during deceleration of the turbo molecular pump, to thereby supply the brake gas into the turbo molecular pump from the ionization chamber through the sample chamber.
3 more elements
Dependencies are inferred from the claim text.