H01J 2237/0805
Liquid metal sources
H01J2237/0805 (Liquid metal sources) appears on 58 US grants and 49 published applications in this corpus.
Search patents in H01J- Granted patents
- 58
- Published applications
- 49
- Assignees
- 23
- Inventors
- 117
- Latest grant
- 29 Apr 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1983 | 1 | 0 |
| 1984 | 1 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 1 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 3 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 1 | 1 |
| 2003 | 1 | 0 |
| 2004 | 1 | 1 |
| 2005 | 2 | 3 |
| 2006 | 1 | 3 |
| 2007 | 4 | 3 |
| 2008 | 2 | 4 |
| 2009 | 1 | 5 |
| 2010 | 4 | 6 |
| 2011 | 3 | 3 |
| 2012 | 7 | 5 |
| 2013 | 9 | 3 |
| 2014 | 1 | 0 |
| 2015 | 2 | 1 |
| 2016 | 1 | 0 |
| 2017 | 1 | 2 |
| 2018 | 0 | 0 |
| 2019 | 1 | 2 |
| 2020 | 2 | 2 |
| 2021 | 1 | 2 |
| 2022 | 1 | 1 |
| 2023 | 2 | 0 |
| 2024 | 0 | 2 |
| 2025 | 1 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Particle beam device having a deflection unit29 Apr 2025US 12,288,664 B2Carl Zeiss Microscopy GmbH
- Liquid metal ion source and focused ion beam apparatus5 Sep 2023US 11,749,493 B2Hitachi High-Tech Science Corporation
- Method and device for operating a liquid metal-ion source or liquid metal electron source as well as a liquid metal-ion source or liquid metal electron source18 Jul 2023US 11,705,299 B2Technische UniversitäT Dresden
- Operating a particle beam generator for a particle beam device5 Jul 2022US 11,380,519 B1Carl Zeiss Microscopy GmbH
- Liquid metal ion source9 Nov 2021US 11,170,967 B2Axcelis Technologies, Inc.
- Liquid metal ion source device for using bismuth and alloy of bismuth3 Oct 2024US 2024/0331967 A1Korea Basic Science Institute
- Method of operating an ion beam source, ion beam source and computer program8 Aug 2024US 2024/0266139 A1
- Particle beam device having a deflection unit17 Nov 2022US 2022/0367142 A1Carl Zeiss Microscopy GmbH
- Method and device for operating a liquid metal-ion source or liquid metal electron source as well as a liquid metal-ion source or liquid metal electron source9 Dec 2021US 2021/0383994 A1Technische UniversitäT Dresden
- Liquid metal ion source and focused ion beam apparatus25 Mar 2021US 2021/0090842 A1Hitachi High-Tech Science Corporation
Most cited
By later US patents
- Multilayered device micro etching method and system96US 5,055,696 AHitachi, Ltd. · 1991
- Processing method and apparatus using focused ion beam generating means79US 5,825,035 AHitachi, Ltd. · 1998
- Ion beam source54US 4,467,240 AHitachi, Ltd. · 1984
- Process method and apparatus using focused ion beam generating means52US 5,504,340 AHitachi, Ltd. · 1996
- Process method and apparatus using focused ion beam generating means43US 5,583,344 AHitachi, Ltd. · 1996