Ion beam source
AssigneeHitachi, Ltd.
InventorsMasaaki Futamoto, Isamu Yuito, Ushio Kawabe
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Abstract
An ion beam source characterized in that a needle-like tip is comprised of a carbide, a nitride, or a diboride of at least one element selected from the group consisting of Ti, Zr, Hf, V, Nb and Ta, a hexaboride of at least one element of rare earth metal elements of atomic numbers 57-70, or carbon. Stable ion beam emission of high brightness and long life can be obtained by using the needle-like tip of the said material.
Claims16
An ion beam source comprising an ionization chamber, a needle-like tip disposed in the ionization chamber, a support for the needle-like tip, a supply source for a substance to be ionized, and a cathode, the needle-like tip being comprised of a carbide, a nitride, or a diboride of at least one element selected from the group consisting of Ti, Zr, Hf, V, Nb and Ta, a hexaboride of at least one element of rare earth metal elements of atomic numbers 57-70, or carbon.
Dependencies are inferred from the claim text.