Particle beam device having a deflection unit

A particle beam device for imaging, analyzing and/or processing an object, comprising:

• an optical axis;
• a first particle beam generator that generates a first particle beam having first charged particles, wherein the first particle beam generator has a first generator beam axis, wherein the optical axis and the first generator beam axis are identical;
• a second particle beam generator that generates a second particle beam having second charged particles, wherein the second particle beam generator has a second generator beam axis, wherein the optical axis and the second generator beam axis are arranged at an angle being different from 0° and 180°;
• a deflection unit that deflects the second charged particles from the second generator beam axis to the optical axis and along the optical axis, wherein the deflection unit has a first opening and a second opening being different from the first opening, wherein the optical axis runs through the first opening, wherein the second generator beam axis runs through the second opening;
• at least one objective lens that focuses the first particle beam or the second particle beam onto the object, wherein the optical axis runs through the objective lens;
• and
• at least one detector that detects interaction particles and/or interaction radiation, the interaction particles and the interaction radiation being generated when the first particle beam or the second particle beam impinges on the object, wherein the deflection unit is a magnetic deflection unit providing a non-homogeneous magnetic field and wherein the deflection unit has a first pole piece and a second pole piece arranged opposite the first pole piece, wherein a cone-shaped opening having a half cone angle is arranged between the first pole piece and the second pole piece, wherein the optical axis runs through the cone-shaped opening and wherein the first pole piece and the second pole piece have a yoke that includes a coil arranged at the yoke.

A particle beam device for imaging, analyzing and/or processing an object, comprising:

• an optical axis;
• a first particle beam generator that generates a first particle beam having first charged particles, wherein the first particle beam generator has a first generator beam axis, wherein the optical axis and the first generator beam axis are identical;
• a second particle beam generator that generates a second particle beam having second charged particles, wherein the second particle beam generator has a second generator beam axis, wherein the optical axis and the second generator beam axis are arranged at an angle being different from 0° and 180°;
• a deflection unit that deflects the second charged particles from the second generator beam axis to the optical axis and along the optical axis, wherein the deflection unit has a first opening and a second opening being different from the first opening, wherein the optical axis runs through the first opening, wherein the second generator beam axis runs through the second opening;
• at least one objective lens that focuses the first particle beam or the second particle beam onto the object, wherein the optical axis runs through the objective lens;
• and
• at least one detector that detects interaction particles and/or interaction radiation, the interaction particles and the interaction radiation being generated when the first particle beam or the second particle beam impinges on the object, wherein the deflection unit is an electrostatic deflection unit providing an electric field.