G03F 7/706849
Irradiation branch
Official title: {Irradiation branch, e.g. optical system details, illumination mode or polarisation control}
G03F7/706849 (Irradiation branch) appears on 57 US grants and 154 published applications in this corpus.
Search patents in G03F- Granted patents
- 57
- Published applications
- 154
- Assignees
- 34
- Inventors
- 366
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2011 | 0 | 1 |
| 2012 | 0 | 0 |
| 2013 | 0 | 0 |
| 2014 | 0 | 0 |
| 2015 | 0 | 0 |
| 2016 | 0 | 0 |
| 2017 | 0 | 1 |
| 2018 | 0 | 0 |
| 2019 | 1 | 2 |
| 2020 | 1 | 0 |
| 2021 | 1 | 3 |
| 2022 | 3 | 2 |
| 2023 | 5 | 19 |
| 2024 | 7 | 40 |
| 2025 | 21 | 48 |
| 2026 | 18 | 38 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Intensity measurements using off-axis illumination6 Oct 2026US 12,754,488 B2ASML Netherlands B. V.
- Assembly for a laser-operated light source and method of use15 Sep 2026US 12,736,884 B2ASML Netherlands B. V.
- Exposure apparatus and article manufacturing method1 Sep 2026US 12,724,351 B2Canon Kabushiki Kaisha
- Off-axis through the lens mutually coherent dark field imaging system with incoherent light for overlay metrology25 Aug 2026US 12,717,248 B2KLA Corporation
- Methods for measurement of rAIM18 Aug 2026US 12,710,698 B2KLA Corporation
- Precise, High Throughput Optical Imaging Of Packaged Devices8 Oct 2026US 2026/0310105 A1
- Apparatus for wavelength-resolved beam monitoring1 Oct 2026US 2026/0299434 A1ASML Netherlands B. V.
- Configurable illumination source for optical metrology and related methods1 Oct 2026US 2026/0299435 A1Nova Ltd.
- Illumination apparatus, measurement apparatus, substrate processing apparatus, and method for manufacturing article1 Oct 2026US 2026/0299436 A1Canon Kabushiki Kaisha
- Bright light source for metrology24 Sep 2026US 2026/0288019 A1Nanoverse Technologies Ltd
Most cited
By later US patents
- Pupil-plane beam scanning for metrology13US 11,300,524 B1KLA Corporation · 2022
- Scanning scatterometry overlay measurement13US 11,428,642 B2KLA Corporation · 2022
- Measurement modes for overlay5US 11,346,657 B2KLA Corporation · 2022
- Multi-directional overlay metrology using multiple illumination parameters and isolated imaging3US 11,800,212 B1KLA Corporation · 2023
- Overlay measurement apparatus3US 11,835,865 B2Auros Technology, Inc. · 2023