Exposure apparatus and article manufacturing method

An article manufacturing method comprising:

• exposing a substrate by an exposure apparatus for exposing a plurality of shot regions on the substrate;
• developing the substrate having undergone the exposing;
• and
• obtaining an article by processing the substrate having undergone the developing,
• wherein the exposure apparatus comprises a projection optical system, a drive mechanism configured to drive the substrate, a detector configured to detect a surface height of the substrate, and a controller configured to control the drive mechanism based on an output of the detector,
• wherein the projection optical system is configured to project a pattern of an original to an exposure region in an image plane of the projection optical system, a detection region of the detector is larger than the exposure region, and the controller is configured to control, based on an output of the detector obtained when (i) a first shot region of the plurality of shot regions is arranged in the exposure region and (ii) the first shot region and at least a part of a second shot region of the plurality of shot regions are arranged in the detection region, driving of the substrate, by the drive mechanism, for exposing the second shot region.