G03F 7/70158
Diffractive optical elements
Official title: {Diffractive optical elements}
G03F7/70158 (Diffractive optical elements) appears on 221 US grants and 240 published applications in this corpus.
Search patents in G03F- Granted patents
- 221
- Published applications
- 240
- Assignees
- 68
- Inventors
- 398
- Latest grant
- 28 Jul 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 1 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 3 | 0 |
| 1998 | 5 | 0 |
| 1999 | 2 | 0 |
| 2000 | 3 | 0 |
| 2001 | 6 | 3 |
| 2002 | 1 | 6 |
| 2003 | 6 | 17 |
| 2004 | 11 | 18 |
| 2005 | 12 | 15 |
| 2006 | 11 | 12 |
| 2007 | 9 | 15 |
| 2008 | 9 | 11 |
| 2009 | 1 | 13 |
| 2010 | 3 | 6 |
| 2011 | 8 | 10 |
| 2012 | 2 | 3 |
| 2013 | 5 | 12 |
| 2014 | 4 | 4 |
| 2015 | 16 | 6 |
| 2016 | 8 | 5 |
| 2017 | 14 | 7 |
| 2018 | 13 | 14 |
| 2019 | 9 | 14 |
| 2020 | 18 | 12 |
| 2021 | 11 | 7 |
| 2022 | 8 | 9 |
| 2023 | 0 | 10 |
| 2024 | 5 | 2 |
| 2025 | 10 | 7 |
| 2026 | 5 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Diffraction-based illumination sampling28 Jul 2026US 12,693,155 B2KLA Corporation
- Imaging optical unit30 Jun 2026US 12,669,755 B2Carl Zeiss SMT GmbH
- Method for producing an optical element9 Jun 2026US 12,650,544 B2Carl Zeiss SMT GmbH
- Transmissive diffraction grating2 Jun 2026US 12,645,017 B2ASML Netherlands B. V.
- Optical devices and methods for manufacturing the optical devices10 Mar 2026US 12,572,079 B2II-Vi Delaware, Inc.
- Method and apparatus for controlling a lithographic apparatus, and a lithographic apparatus19 Mar 2026US 2026/0079406 A1ASML Netherlands B. V.
- Blazed grating based reflective spectral purity filter for euv imaging systems19 Feb 2026US 2026/0050112 A1KLA Corporation
- Method and apparatus for determining a physical quantity23 Oct 2025US 2025/0328085 A1ASML Netheriands B. V.
- Euv collector25 Sep 2025US 2025/0298175 A1
- Laser processing system, laser processing method, and method for manufacturing electronic device14 Aug 2025US 2025/0258438 A1Gigaphoton Inc.
Most cited
By later US patents
- Hybrid illumination system for use in photolithography131US 5,631,721 ASVG Lithography Systems, Inc. · 1997
- Optical illumination device, exposure device and exposure method104US 6,913,373 B2Nikon Corporation · 2005
- Projection exposure method and apparatus100US 6,211,944 B1Nikon Corporation · 2001
- Projection exposure apparatus75US 6,252,647 B1Nikon Corporation · 2001
- Projection exposure apparatus and method67US 6,710,855 B2Nikon Corporation · 2004