Method for producing an optical element
AssigneeCarl Zeiss SMT GmbH
InventorsRalf Winter, Vitaly Shklover
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AssigneeCarl Zeiss SMT GmbH
InventorsRalf Winter, Vitaly Shklover
Estimating the term…
An optical element (11) has an optical surface (20) with a diffraction structure (21). The optical surface (20) is curved such that a distance-to-diameter ratio between a distance A between a deepest point (T) and a highest point (H) and a largest diameter D is greater than 1/10. When producing the optical element (11), firstly a raw optical element having a raw optical surface to be provided with the diffraction structure (21) is provided. The raw optical surface is then coated with a photoresist with the aid of an isotropic deposition method and the photoresist is exposed and then developed. This results in a production method for an optical element with an optical surface having a diffraction structure, which method satisfies stringent requirements made of a structure accuracy when producing the diffraction structure.
Method for producing an optical element with an optical surface having a diffraction structure,
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