Diffraction-based illumination sampling
AssigneeKLA Corporation
InventorFlorian Melsheimer
Life of this patent
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Abstract
An illumination system may include an optical homogenizer to homogenize a beam of light and a grating positioned in a path for the homogenized beam of light, to diffract light from the homogenized beam. The illumination system also includes a detector to receive light diffracted by the grating and to measure a power of the received light. The grating is disposed, for example, on an inner surface of the optical homogenizer or on a surface of a focusing mirror. Alternatively, the grating is disposed on the surface of the focusing mirror and the optical homogenizer is omitted from the illumination system.
Claims20
An illumination system, comprising:
- an optical homogenizer to homogenize a beam of light;
- a grating positioned in a path for the homogenized beam of light, to diffract light from the homogenized beam;
- and
- a detector to receive light diffracted by the grating and to measure a power of the received light.
A method, comprising:
- homogenizing a beam of light;
- diffracting light from the homogenized beam, using a grating positioned in a path for the homogenized beam;
- and
- measuring a power of the diffracted light.
An illumination system, comprising:
- a focusing mirror to focus an unhomogenized beam of light;
- a grating, disposed on a surface of the focusing mirror, to diffract light from the beam;
- and
- a detector to receive light diffracted by the grating and to measure a power of the received light.
Dependencies are inferred from the claim text.