G01Q 30/02
Non-spm analysing devices
Official title: Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
G01Q30/02 (Non-spm analysing devices) appears on 369 US grants and 301 published applications in this corpus.
Search patents in G01Q- Granted patents
- 369
- Published applications
- 301
- Assignees
- 201
- Inventors
- 761
- Latest grant
- 7 Jul 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1989 | 2 | 0 |
| 1990 | 4 | 0 |
| 1991 | 5 | 0 |
| 1992 | 4 | 0 |
| 1993 | 7 | 0 |
| 1994 | 7 | 0 |
| 1995 | 8 | 0 |
| 1996 | 8 | 0 |
| 1997 | 6 | 0 |
| 1998 | 5 | 0 |
| 1999 | 10 | 0 |
| 2000 | 9 | 0 |
| 2001 | 12 | 4 |
| 2002 | 8 | 4 |
| 2003 | 6 | 5 |
| 2004 | 1 | 2 |
| 2005 | 5 | 8 |
| 2006 | 7 | 11 |
| 2007 | 6 | 4 |
| 2008 | 9 | 15 |
| 2009 | 10 | 6 |
| 2010 | 10 | 12 |
| 2011 | 8 | 11 |
| 2012 | 10 | 13 |
| 2013 | 17 | 12 |
| 2014 | 22 | 13 |
| 2015 | 15 | 29 |
| 2016 | 17 | 8 |
| 2017 | 9 | 14 |
| 2018 | 19 | 22 |
| 2019 | 12 | 24 |
| 2020 | 24 | 12 |
| 2021 | 10 | 16 |
| 2022 | 15 | 17 |
| 2023 | 17 | 10 |
| 2024 | 10 | 16 |
| 2025 | 11 | 7 |
| 2026 | 4 | 6 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Tip-enhanced spectroscopy7 Jul 2026US 12,674,746 B2Postech Research and Business Development Foundation
- System and method for generating and analyzing roughness measurements and their use for process monitoring and control23 Jun 2026US 12,665,160 B2Fractilia, LLC
- Scanning probe microscope9 Jun 2026US 12,650,585 B2Hitachi, Ltd.
- Method and apparatus for measuring magnetic field strength26 May 2026US 12,638,522 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Device and method for comprehensive characterization, analysis, hetero-genity and purity quantification of extracellular vesicles18 Nov 2025US 12,474,370 B2Lua Optomekatronik ARGE A.S.
- Holding Device and Method for Probe Microscopy and Optical Methods8 Oct 2026US 2026/0309745 A1Bruker Nano, Inc.
- Method for measuring cellular mechanics in an in vitro fibrosis model24 Sep 2026US 2026/0287509 A1National Cheng Kung University
- Method of Dispositioning and Control of a Semiconductor Manufacturing Process10 Sep 2026US 2026/0269176 A1Fractilia, LLC
- Method of Dispositioning and Control of a Semiconductor Manufacturing Process27 Aug 2026US 2026/0253833 A1Fractilia, LLC
- Scanning probe microscopy device and method of scanning a surface of a material layer13 Aug 2026US 2026/0235643 A1Demcon Tsst B.V.
Most cited
By later US patents
- Scanning probe microscope143US 5,376,790 APark Scientific Instruments · 1994
- Large stage system for scanning probe microscopes and other instruments125US 5,672,816 APark Scientific Instruments · 1997
- Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images114US 6,232,597 B1General Nanotechnology LLC · 2001
- Edge detector101US 5,304,924 ACanon Kabushiki Kaisha · 1994
- Optical profilometer combined with stylus probe measurement device89US 5,955,661 AKLA-Tencor Corporation · 1999