Method and apparatus for measuring magnetic field strength
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsBaohua Niu, Ji-Feng Ying
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Abstract
An apparatus for measuring a magnetic field strength is provided. The apparatus includes a stage on which a sample to be measured is placed, a cantilever having a tip, an optical system having a light source and a light receiver, and a microwave power source. The tip is a diamond tip having a nitrogen vacancy defect. The optical system is configured such that excitation light from the light source is focused at the diamond tip. The cantilever is configured as a coaxial microwave antenna through which microwaves from the microwave power source are supplied to the diamond tip.
Claims20
A cantilever comprising:
- a cantilever body;
- a tip attached to the cantilever body;
- a conductive wire embedded in the cantilever body and coupled to the tip;
- and
- a conductive cover forming a coaxial microwave guide with the conductive wire, wherein the coaxial microwave guide is configured to deliver microwaves to the tip.
A system for measuring a magnetic field strength, comprising:
- a cantilever comprising a cantilever body, a tip attached to the cantilever body, a conductive wire embedded in the cantilever body and coupled to the tip, and a conductive cover forming a coaxial microwave guide with the conductive wire, wherein the coaxial microwave guide is configured to deliver microwaves to the tip;
- and
- a microwave power source configured to supply the microwaves through the cantilever to the tip, wherein the microwave power source and the tip are impedance matched.
A system for measuring a magnetic field strength, comprising:
- a cantilever comprising a cantilever body, a tip attached to the cantilever body, a conductive wire embedded in the cantilever body and coupled to the tip, and a conductive cover forming a coaxial microwave guide with the conductive wire, wherein the coaxial microwave guide is configured to deliver microwaves to the tip;
- and
- an optical system having a light source and a light receiver, wherein the light source is configured to focus an excitation light at the tip.
Dependencies are inferred from the claim text.