Large stage system for scanning probe microscopes and other instruments

Abstract

A large scale horizontal translation stage for a microscope or other instrument particularly a scanning probe microscope is disclosed. The translation stage is provided with air bearings which allow it to float over a planar surface. The translation stage is kinematically mounted on a guiding member such that the horizontal position of the translation stage is defined by the guiding member but the translation stage is free to move in a direction perpendicular to the planar surface. To position a sample, the air bearings are actuated and the guiding member moves the translation stage to a desired position. An attractive force, preferably suction in the air bearings, is then applied to hold the translation stage firmly against the supporting surface while the sample is analyzed. The preferred embodiment includes two optical microscopes. The first optical microscope is directed substantially perpendicular to the plane of the sample and has a focal point which coincides with the surface of the sample when it is being positioned by the translation stage. The second optical microscope is directed obliquely and focused on the probe.

Dependencies are inferred from the claim text.