Optical profilometer combined with stylus probe measurement device

A method of operating a sensing instrument comprising:

• providing an object;
• using an optical profilometer to position a stylus probe measuring device on the object;
• obtaining data about the object using stylus probe measuring device;
• and
• using the stylus probe measuring device data to calibrate the X and Y position offset between the optical profilometer and the stylus probe measuring device.

A method of operating a sensing instrument comprising:

• providing a test object;
• using an optical device to position a scanning probe microscope on the test object;
• obtaining data about the test object using a scanning probe microscope;
• and
• using the scanning probe microscope data to calibrate the X and Y position offset between the optical device and the scanning probe microscope, wherein the providing step comprises providing a test object with a raised edge and wherein the scanning probe microscope data obtaining step includes sweeping the scanning probe microscope towards the raised edge so that an offset along one axis is determinable from an indication of the raised edge.

A method of operating a sensing instrument comprising:

• obtaining profile data about a sample using an optical profilometer;
• and
• obtaining profile data about the sample using a stylus probe measuring device;
• wherein the two obtaining steps are done without removing the sample from the instrument.

A method of operating a sensing instrument comprising:

• providing an object;
• using an optical profilometer to locate a position on an object;
• positioning a stylus probe measuring device at the position;
• and
• obtaining profile information concerning the position using the stylus probe measuring device.

A method of operating a sensing instrument comprising:

• providing an instrument having at least two sensors;
• measuring an object with one of the sensors;
• moving another of the sensors to a measuring location using positional offset information;
• measuring the object with the other of the sensors;
• and
• producing displays of the measured data, measurement cursors in the displays being correlated by the positional offset information.